JPS54161454U - - Google Patents

Info

Publication number
JPS54161454U
JPS54161454U JP5772178U JP5772178U JPS54161454U JP S54161454 U JPS54161454 U JP S54161454U JP 5772178 U JP5772178 U JP 5772178U JP 5772178 U JP5772178 U JP 5772178U JP S54161454 U JPS54161454 U JP S54161454U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5772178U
Other languages
Japanese (ja)
Other versions
JPS569883Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1978057721U priority Critical patent/JPS569883Y2/ja
Publication of JPS54161454U publication Critical patent/JPS54161454U/ja
Application granted granted Critical
Publication of JPS569883Y2 publication Critical patent/JPS569883Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Sealing Devices (AREA)
  • Sealing Material Composition (AREA)
JP1978057721U 1978-04-28 1978-04-28 Expired JPS569883Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1978057721U JPS569883Y2 (enrdf_load_html_response) 1978-04-28 1978-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1978057721U JPS569883Y2 (enrdf_load_html_response) 1978-04-28 1978-04-28

Publications (2)

Publication Number Publication Date
JPS54161454U true JPS54161454U (enrdf_load_html_response) 1979-11-12
JPS569883Y2 JPS569883Y2 (enrdf_load_html_response) 1981-03-05

Family

ID=28955867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1978057721U Expired JPS569883Y2 (enrdf_load_html_response) 1978-04-28 1978-04-28

Country Status (1)

Country Link
JP (1) JPS569883Y2 (enrdf_load_html_response)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017190744A (ja) * 2016-04-14 2017-10-19 東京エレクトロン株式会社 加熱装置およびターボ分子ポンプ

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7464398B2 (ja) * 2020-02-13 2024-04-09 住友重機械工業株式会社 極低温冷凍機およびシール部品

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS45406Y1 (enrdf_load_html_response) * 1966-02-14 1970-01-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS45406Y1 (enrdf_load_html_response) * 1966-02-14 1970-01-09

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017190744A (ja) * 2016-04-14 2017-10-19 東京エレクトロン株式会社 加熱装置およびターボ分子ポンプ
TWI731955B (zh) * 2016-04-14 2021-07-01 日商東京威力科創股份有限公司 加熱裝置及渦輪分子幫浦

Also Published As

Publication number Publication date
JPS569883Y2 (enrdf_load_html_response) 1981-03-05

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