JPS54161454U - - Google Patents
Info
- Publication number
- JPS54161454U JPS54161454U JP5772178U JP5772178U JPS54161454U JP S54161454 U JPS54161454 U JP S54161454U JP 5772178 U JP5772178 U JP 5772178U JP 5772178 U JP5772178 U JP 5772178U JP S54161454 U JPS54161454 U JP S54161454U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Sealing Devices (AREA)
- Sealing Material Composition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978057721U JPS569883Y2 (OSRAM) | 1978-04-28 | 1978-04-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1978057721U JPS569883Y2 (OSRAM) | 1978-04-28 | 1978-04-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54161454U true JPS54161454U (OSRAM) | 1979-11-12 |
| JPS569883Y2 JPS569883Y2 (OSRAM) | 1981-03-05 |
Family
ID=28955867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1978057721U Expired JPS569883Y2 (OSRAM) | 1978-04-28 | 1978-04-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS569883Y2 (OSRAM) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017190744A (ja) * | 2016-04-14 | 2017-10-19 | 東京エレクトロン株式会社 | 加熱装置およびターボ分子ポンプ |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7464398B2 (ja) * | 2020-02-13 | 2024-04-09 | 住友重機械工業株式会社 | 極低温冷凍機およびシール部品 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS45406Y1 (OSRAM) * | 1966-02-14 | 1970-01-09 |
-
1978
- 1978-04-28 JP JP1978057721U patent/JPS569883Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS45406Y1 (OSRAM) * | 1966-02-14 | 1970-01-09 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2017190744A (ja) * | 2016-04-14 | 2017-10-19 | 東京エレクトロン株式会社 | 加熱装置およびターボ分子ポンプ |
| TWI731955B (zh) * | 2016-04-14 | 2021-07-01 | 日商東京威力科創股份有限公司 | 加熱裝置及渦輪分子幫浦 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS569883Y2 (OSRAM) | 1981-03-05 |