JPS54152298A - Charged particle beam working device - Google Patents

Charged particle beam working device

Info

Publication number
JPS54152298A
JPS54152298A JP6122478A JP6122478A JPS54152298A JP S54152298 A JPS54152298 A JP S54152298A JP 6122478 A JP6122478 A JP 6122478A JP 6122478 A JP6122478 A JP 6122478A JP S54152298 A JPS54152298 A JP S54152298A
Authority
JP
Japan
Prior art keywords
charged particle
particle beam
working device
beam working
charged
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6122478A
Other languages
Japanese (ja)
Other versions
JPS6233033B2 (en
Inventor
Seiji Mochida
Setsu Ozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Osaka Transformer Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Osaka Transformer Co Ltd filed Critical Osaka Transformer Co Ltd
Priority to JP6122478A priority Critical patent/JPS54152298A/en
Publication of JPS54152298A publication Critical patent/JPS54152298A/en
Publication of JPS6233033B2 publication Critical patent/JPS6233033B2/ja
Granted legal-status Critical Current

Links

JP6122478A 1978-05-22 1978-05-22 Charged particle beam working device Granted JPS54152298A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6122478A JPS54152298A (en) 1978-05-22 1978-05-22 Charged particle beam working device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6122478A JPS54152298A (en) 1978-05-22 1978-05-22 Charged particle beam working device

Publications (2)

Publication Number Publication Date
JPS54152298A true JPS54152298A (en) 1979-11-30
JPS6233033B2 JPS6233033B2 (en) 1987-07-17

Family

ID=13165014

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6122478A Granted JPS54152298A (en) 1978-05-22 1978-05-22 Charged particle beam working device

Country Status (1)

Country Link
JP (1) JPS54152298A (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5014445U (en) * 1973-06-04 1975-02-15
JPS5212021A (en) * 1975-07-17 1977-01-29 Brother Ind Ltd Typewriter having ribbon cartridge

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5014445U (en) * 1973-06-04 1975-02-15
JPS5212021A (en) * 1975-07-17 1977-01-29 Brother Ind Ltd Typewriter having ribbon cartridge

Also Published As

Publication number Publication date
JPS6233033B2 (en) 1987-07-17

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