JPS54152298A - Charged particle beam working device - Google Patents
Charged particle beam working deviceInfo
- Publication number
- JPS54152298A JPS54152298A JP6122478A JP6122478A JPS54152298A JP S54152298 A JPS54152298 A JP S54152298A JP 6122478 A JP6122478 A JP 6122478A JP 6122478 A JP6122478 A JP 6122478A JP S54152298 A JPS54152298 A JP S54152298A
- Authority
- JP
- Japan
- Prior art keywords
- charged particle
- particle beam
- working device
- beam working
- charged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6122478A JPS54152298A (en) | 1978-05-22 | 1978-05-22 | Charged particle beam working device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6122478A JPS54152298A (en) | 1978-05-22 | 1978-05-22 | Charged particle beam working device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54152298A true JPS54152298A (en) | 1979-11-30 |
JPS6233033B2 JPS6233033B2 (en) | 1987-07-17 |
Family
ID=13165014
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6122478A Granted JPS54152298A (en) | 1978-05-22 | 1978-05-22 | Charged particle beam working device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54152298A (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5014445U (en) * | 1973-06-04 | 1975-02-15 | ||
JPS5212021A (en) * | 1975-07-17 | 1977-01-29 | Brother Ind Ltd | Typewriter having ribbon cartridge |
-
1978
- 1978-05-22 JP JP6122478A patent/JPS54152298A/en active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5014445U (en) * | 1973-06-04 | 1975-02-15 | ||
JPS5212021A (en) * | 1975-07-17 | 1977-01-29 | Brother Ind Ltd | Typewriter having ribbon cartridge |
Also Published As
Publication number | Publication date |
---|---|
JPS6233033B2 (en) | 1987-07-17 |
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