JPS541433B2 - - Google Patents
Info
- Publication number
- JPS541433B2 JPS541433B2 JP14628775A JP14628775A JPS541433B2 JP S541433 B2 JPS541433 B2 JP S541433B2 JP 14628775 A JP14628775 A JP 14628775A JP 14628775 A JP14628775 A JP 14628775A JP S541433 B2 JPS541433 B2 JP S541433B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14628775A JPS5270497A (en) | 1975-12-10 | 1975-12-10 | Exposure device |
| US05/675,170 US4063103A (en) | 1975-04-11 | 1976-04-08 | Electron beam exposure apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14628775A JPS5270497A (en) | 1975-12-10 | 1975-12-10 | Exposure device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5270497A JPS5270497A (en) | 1977-06-11 |
| JPS541433B2 true JPS541433B2 (ja) | 1979-01-24 |
Family
ID=15404277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14628775A Granted JPS5270497A (en) | 1975-04-11 | 1975-12-10 | Exposure device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5270497A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5789969A (en) * | 1980-11-26 | 1982-06-04 | Ricoh Co Ltd | Ink mist recovery device |
| JPS58175937U (ja) * | 1982-05-20 | 1983-11-25 | 三洋電機株式会社 | インクジエツトプリンタ |
| JPS61121941A (ja) * | 1984-11-19 | 1986-06-09 | Canon Inc | インクジエツト記録装置 |
| JPS6361182B2 (ja) * | 1980-07-15 | 1988-11-28 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4664552B2 (ja) * | 2001-09-28 | 2011-04-06 | 株式会社東芝 | 可変成型ビーム型パターン描画装置 |
-
1975
- 1975-12-10 JP JP14628775A patent/JPS5270497A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6361182B2 (ja) * | 1980-07-15 | 1988-11-28 | ||
| JPS5789969A (en) * | 1980-11-26 | 1982-06-04 | Ricoh Co Ltd | Ink mist recovery device |
| JPS58175937U (ja) * | 1982-05-20 | 1983-11-25 | 三洋電機株式会社 | インクジエツトプリンタ |
| JPS61121941A (ja) * | 1984-11-19 | 1986-06-09 | Canon Inc | インクジエツト記録装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5270497A (en) | 1977-06-11 |