JPS5270497A - Exposure device - Google Patents

Exposure device

Info

Publication number
JPS5270497A
JPS5270497A JP14628775A JP14628775A JPS5270497A JP S5270497 A JPS5270497 A JP S5270497A JP 14628775 A JP14628775 A JP 14628775A JP 14628775 A JP14628775 A JP 14628775A JP S5270497 A JPS5270497 A JP S5270497A
Authority
JP
Japan
Prior art keywords
unit
exposure device
loosen
interruption
eliminated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14628775A
Other languages
Japanese (ja)
Other versions
JPS541433B2 (en
Inventor
Masahiko Washimi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP14628775A priority Critical patent/JPS5270497A/en
Priority to US05/675,170 priority patent/US4063103A/en
Publication of JPS5270497A publication Critical patent/JPS5270497A/en
Publication of JPS541433B2 publication Critical patent/JPS541433B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)

Abstract

PURPOSE: To provide an exposure device characterized in that control accuracy of a specimen base is loosen and conversion into a different unit system is eliminated, by such a system that measurement is made at an unit of a laser wave length and interruption of requirement for data is made on a computer storing a display data according to change in unit by unit, and thereafter displayed.
COPYRIGHT: (C)1977,JPO&Japio
JP14628775A 1975-04-11 1975-12-10 Exposure device Granted JPS5270497A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP14628775A JPS5270497A (en) 1975-12-10 1975-12-10 Exposure device
US05/675,170 US4063103A (en) 1975-04-11 1976-04-08 Electron beam exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14628775A JPS5270497A (en) 1975-12-10 1975-12-10 Exposure device

Publications (2)

Publication Number Publication Date
JPS5270497A true JPS5270497A (en) 1977-06-11
JPS541433B2 JPS541433B2 (en) 1979-01-24

Family

ID=15404277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14628775A Granted JPS5270497A (en) 1975-04-11 1975-12-10 Exposure device

Country Status (1)

Country Link
JP (1) JPS5270497A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4664552B2 (en) * 2001-09-28 2011-04-06 株式会社東芝 Variable shaped beam pattern drawing device

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5722064A (en) * 1980-07-15 1982-02-04 Canon Inc Ink jet recording device
JPS5789969A (en) * 1980-11-26 1982-06-04 Ricoh Co Ltd Ink mist recovery device
JPS58175937U (en) * 1982-05-20 1983-11-25 三洋電機株式会社 inkjet printer
JPS61121941A (en) * 1984-11-19 1986-06-09 Canon Inc Ink jet recording apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4664552B2 (en) * 2001-09-28 2011-04-06 株式会社東芝 Variable shaped beam pattern drawing device

Also Published As

Publication number Publication date
JPS541433B2 (en) 1979-01-24

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