JPS54134984A - Controller for table movement - Google Patents
Controller for table movementInfo
- Publication number
- JPS54134984A JPS54134984A JP4304978A JP4304978A JPS54134984A JP S54134984 A JPS54134984 A JP S54134984A JP 4304978 A JP4304978 A JP 4304978A JP 4304978 A JP4304978 A JP 4304978A JP S54134984 A JPS54134984 A JP S54134984A
- Authority
- JP
- Japan
- Prior art keywords
- laser
- movement
- stopper
- detected
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Abstract
PURPOSE: To control the movement of a table with high precision by accurately determining a measurement starting point by initializing the laser counter of a laser- length measuring instrument completely at a movement stop position of the table.
CONSTITUTION: Movable body 15 is provided with a table. At the time of the 2nd positioning, table 2 is position-detected by detectors 16a and 16b without the fixed range and its moving speed is reduced quickly, so that is will stop by coming in contact with stoppers 17a and 17b slowly. In this case, the driving motor for the table rotates more, so that the driving current will increase suddenly. Thin increase is differentiated and detected, which is useded as the initialization signal of the laser counter of a laser interferometer. By this signal, the motor is turned reversely to detach body 15 from the stopper. Therefore, the length of table 2 can be measured accurately by regarding the contact point between the stopper and body 15 as the start point. Since the movement is slower while table 2 is stopping, no error due to inertia is caused, so that the reproducibility will be excellent.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4304978A JPS54134984A (en) | 1978-04-12 | 1978-04-12 | Controller for table movement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4304978A JPS54134984A (en) | 1978-04-12 | 1978-04-12 | Controller for table movement |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS54134984A true JPS54134984A (en) | 1979-10-19 |
Family
ID=12653017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4304978A Pending JPS54134984A (en) | 1978-04-12 | 1978-04-12 | Controller for table movement |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54134984A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59229608A (en) * | 1983-06-10 | 1984-12-24 | Amada Co Ltd | Method for returning moving body to original point |
| JPS61196308A (en) * | 1985-02-27 | 1986-08-30 | Mita Ind Co Ltd | Optical part controller for copying machine |
| JPH04104308U (en) * | 1991-02-12 | 1992-09-08 | ミツミ電機株式会社 | switch device |
| JP2014500701A (en) * | 2010-12-24 | 2014-01-09 | 北大方正集▲団▼有限公司 | Linear reciprocating device and positioning control method thereof |
-
1978
- 1978-04-12 JP JP4304978A patent/JPS54134984A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59229608A (en) * | 1983-06-10 | 1984-12-24 | Amada Co Ltd | Method for returning moving body to original point |
| JPS61196308A (en) * | 1985-02-27 | 1986-08-30 | Mita Ind Co Ltd | Optical part controller for copying machine |
| JPH04104308U (en) * | 1991-02-12 | 1992-09-08 | ミツミ電機株式会社 | switch device |
| JP2014500701A (en) * | 2010-12-24 | 2014-01-09 | 北大方正集▲団▼有限公司 | Linear reciprocating device and positioning control method thereof |
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