JPS54134983A - Positioning unit - Google Patents

Positioning unit

Info

Publication number
JPS54134983A
JPS54134983A JP4298778A JP4298778A JPS54134983A JP S54134983 A JPS54134983 A JP S54134983A JP 4298778 A JP4298778 A JP 4298778A JP 4298778 A JP4298778 A JP 4298778A JP S54134983 A JPS54134983 A JP S54134983A
Authority
JP
Japan
Prior art keywords
straight
motor
line motion
driving
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4298778A
Other languages
Japanese (ja)
Inventor
Takashi Uchiyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP4298778A priority Critical patent/JPS54134983A/en
Publication of JPS54134983A publication Critical patent/JPS54134983A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/3435—Target holders (includes backing plates and endblocks)

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

PURPOSE:To attain positioning by driving a table through a rotary motion and a straight-line motion without mutual interference. CONSTITUTION:Motor 14 drives slider 12 to give driving shaft 9 a straight-line motion. Then, driving shaft 9 is turned by motor 11 to displace X table 7 in the X direction through the straight-line motion, and Y table 5 is driven by a rotary motion by way of worm 19 and worm gear 18. In the above constitution, a motor can be placed outside of vacuum chamber 3, influence upon electron beams and a semiconductor sample is removed, and the driving part inside of the vacuum chamber can be operated via one link shaft, so that the fabrication and maintenance will be simplified.
JP4298778A 1978-04-12 1978-04-12 Positioning unit Pending JPS54134983A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4298778A JPS54134983A (en) 1978-04-12 1978-04-12 Positioning unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4298778A JPS54134983A (en) 1978-04-12 1978-04-12 Positioning unit

Publications (1)

Publication Number Publication Date
JPS54134983A true JPS54134983A (en) 1979-10-19

Family

ID=12651375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4298778A Pending JPS54134983A (en) 1978-04-12 1978-04-12 Positioning unit

Country Status (1)

Country Link
JP (1) JPS54134983A (en)

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