JPS5413350B2 - - Google Patents
Info
- Publication number
- JPS5413350B2 JPS5413350B2 JP1706375A JP1706375A JPS5413350B2 JP S5413350 B2 JPS5413350 B2 JP S5413350B2 JP 1706375 A JP1706375 A JP 1706375A JP 1706375 A JP1706375 A JP 1706375A JP S5413350 B2 JPS5413350 B2 JP S5413350B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- X-Ray Techniques (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1706375A JPS5192181A (en) | 1975-02-10 | 1975-02-10 | X senrokopataankeiseihoho oyobi masukukiban |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1706375A JPS5192181A (en) | 1975-02-10 | 1975-02-10 | X senrokopataankeiseihoho oyobi masukukiban |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5192181A JPS5192181A (en) | 1976-08-12 |
| JPS5413350B2 true JPS5413350B2 (nl) | 1979-05-30 |
Family
ID=11933515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1706375A Granted JPS5192181A (en) | 1975-02-10 | 1975-02-10 | X senrokopataankeiseihoho oyobi masukukiban |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5192181A (nl) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5317075A (en) * | 1976-07-30 | 1978-02-16 | Nec Corp | Production of silicon mask for x-ray exposure |
| JPS5317076A (en) * | 1976-07-30 | 1978-02-16 | Nec Corp | Silicon mask for x-ray exposure and its production |
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1975
- 1975-02-10 JP JP1706375A patent/JPS5192181A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5192181A (en) | 1976-08-12 |