JPS5412088A - Guide mechanism for two directions transfering of stage - Google Patents

Guide mechanism for two directions transfering of stage

Info

Publication number
JPS5412088A
JPS5412088A JP7670577A JP7670577A JPS5412088A JP S5412088 A JPS5412088 A JP S5412088A JP 7670577 A JP7670577 A JP 7670577A JP 7670577 A JP7670577 A JP 7670577A JP S5412088 A JPS5412088 A JP S5412088A
Authority
JP
Japan
Prior art keywords
stage
transfering
directions
guide mechanism
guiding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7670577A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5752603B2 (enrdf_load_stackoverflow
Inventor
Satoshi Ido
Kiichi Takamoto
Fujio Komata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP7670577A priority Critical patent/JPS5412088A/ja
Publication of JPS5412088A publication Critical patent/JPS5412088A/ja
Publication of JPS5752603B2 publication Critical patent/JPS5752603B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/44—Movable or adjustable work or tool supports using particular mechanisms
    • B23Q1/56—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/60—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism
    • B23Q1/62—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides
    • B23Q1/621—Movable or adjustable work or tool supports using particular mechanisms with sliding pairs only, the sliding pairs being the first two elements of the mechanism two sliding pairs only, the sliding pairs being the first two elements of the mechanism with perpendicular axes, e.g. cross-slides a single sliding pair followed perpendicularly by a single sliding pair

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electron Beam Exposure (AREA)
  • Control Of Position Or Direction (AREA)
JP7670577A 1977-06-28 1977-06-28 Guide mechanism for two directions transfering of stage Granted JPS5412088A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7670577A JPS5412088A (en) 1977-06-28 1977-06-28 Guide mechanism for two directions transfering of stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7670577A JPS5412088A (en) 1977-06-28 1977-06-28 Guide mechanism for two directions transfering of stage

Publications (2)

Publication Number Publication Date
JPS5412088A true JPS5412088A (en) 1979-01-29
JPS5752603B2 JPS5752603B2 (enrdf_load_stackoverflow) 1982-11-09

Family

ID=13612923

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7670577A Granted JPS5412088A (en) 1977-06-28 1977-06-28 Guide mechanism for two directions transfering of stage

Country Status (1)

Country Link
JP (1) JPS5412088A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0256912U (enrdf_load_stackoverflow) * 1988-10-18 1990-04-24

Also Published As

Publication number Publication date
JPS5752603B2 (enrdf_load_stackoverflow) 1982-11-09

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