JPS54120489A - Polishing pad - Google Patents
Polishing padInfo
- Publication number
- JPS54120489A JPS54120489A JP2533078A JP2533078A JPS54120489A JP S54120489 A JPS54120489 A JP S54120489A JP 2533078 A JP2533078 A JP 2533078A JP 2533078 A JP2533078 A JP 2533078A JP S54120489 A JPS54120489 A JP S54120489A
- Authority
- JP
- Japan
- Prior art keywords
- polishing pad
- polishing
- pad
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2533078A JPS54120489A (en) | 1978-03-06 | 1978-03-06 | Polishing pad |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2533078A JPS54120489A (en) | 1978-03-06 | 1978-03-06 | Polishing pad |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54120489A true JPS54120489A (en) | 1979-09-19 |
JPS5613590B2 JPS5613590B2 (en) | 1981-03-30 |
Family
ID=12162921
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2533078A Granted JPS54120489A (en) | 1978-03-06 | 1978-03-06 | Polishing pad |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54120489A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57127664A (en) * | 1981-01-30 | 1982-08-07 | Harumitsu Yasuda | Method of removing oxide films on stainless steel |
-
1978
- 1978-03-06 JP JP2533078A patent/JPS54120489A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57127664A (en) * | 1981-01-30 | 1982-08-07 | Harumitsu Yasuda | Method of removing oxide films on stainless steel |
Also Published As
Publication number | Publication date |
---|---|
JPS5613590B2 (en) | 1981-03-30 |
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