JPS54120397A - Electron beam exposure device - Google Patents

Electron beam exposure device

Info

Publication number
JPS54120397A
JPS54120397A JP2686278A JP2686278A JPS54120397A JP S54120397 A JPS54120397 A JP S54120397A JP 2686278 A JP2686278 A JP 2686278A JP 2686278 A JP2686278 A JP 2686278A JP S54120397 A JPS54120397 A JP S54120397A
Authority
JP
Japan
Prior art keywords
electron beam
exposure device
beam exposure
electron
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2686278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6149813B2 (enrdf_load_stackoverflow
Inventor
Moriyuki Isobe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP2686278A priority Critical patent/JPS54120397A/ja
Publication of JPS54120397A publication Critical patent/JPS54120397A/ja
Publication of JPS6149813B2 publication Critical patent/JPS6149813B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP2686278A 1978-03-09 1978-03-09 Electron beam exposure device Granted JPS54120397A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2686278A JPS54120397A (en) 1978-03-09 1978-03-09 Electron beam exposure device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2686278A JPS54120397A (en) 1978-03-09 1978-03-09 Electron beam exposure device

Publications (2)

Publication Number Publication Date
JPS54120397A true JPS54120397A (en) 1979-09-18
JPS6149813B2 JPS6149813B2 (enrdf_load_stackoverflow) 1986-10-31

Family

ID=12205089

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2686278A Granted JPS54120397A (en) 1978-03-09 1978-03-09 Electron beam exposure device

Country Status (1)

Country Link
JP (1) JPS54120397A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01137045A (ja) * 1987-11-19 1989-05-30 Nozawa Sangyo Kk 鉄骨構造建物の外壁の施工方法
JPH01122107U (enrdf_load_stackoverflow) * 1988-02-13 1989-08-18

Also Published As

Publication number Publication date
JPS6149813B2 (enrdf_load_stackoverflow) 1986-10-31

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