JPS54116701A - Pump unit - Google Patents

Pump unit

Info

Publication number
JPS54116701A
JPS54116701A JP2418178A JP2418178A JPS54116701A JP S54116701 A JPS54116701 A JP S54116701A JP 2418178 A JP2418178 A JP 2418178A JP 2418178 A JP2418178 A JP 2418178A JP S54116701 A JPS54116701 A JP S54116701A
Authority
JP
Japan
Prior art keywords
faces
chamber
processing
casing
except
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2418178A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6232355B2 (enExample
Inventor
Yutaka Nishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Tokico Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokico Ltd filed Critical Tokico Ltd
Priority to JP2418178A priority Critical patent/JPS54116701A/ja
Publication of JPS54116701A publication Critical patent/JPS54116701A/ja
Publication of JPS6232355B2 publication Critical patent/JPS6232355B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Details Of Reciprocating Pumps (AREA)
JP2418178A 1978-03-03 1978-03-03 Pump unit Granted JPS54116701A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2418178A JPS54116701A (en) 1978-03-03 1978-03-03 Pump unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2418178A JPS54116701A (en) 1978-03-03 1978-03-03 Pump unit

Publications (2)

Publication Number Publication Date
JPS54116701A true JPS54116701A (en) 1979-09-11
JPS6232355B2 JPS6232355B2 (enExample) 1987-07-14

Family

ID=12131161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2418178A Granted JPS54116701A (en) 1978-03-03 1978-03-03 Pump unit

Country Status (1)

Country Link
JP (1) JPS54116701A (enExample)

Also Published As

Publication number Publication date
JPS6232355B2 (enExample) 1987-07-14

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