JPS54115064A - Method of forming metal film - Google Patents

Method of forming metal film

Info

Publication number
JPS54115064A
JPS54115064A JP2252778A JP2252778A JPS54115064A JP S54115064 A JPS54115064 A JP S54115064A JP 2252778 A JP2252778 A JP 2252778A JP 2252778 A JP2252778 A JP 2252778A JP S54115064 A JPS54115064 A JP S54115064A
Authority
JP
Japan
Prior art keywords
metal film
forming metal
forming
film
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2252778A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6136375B2 (enrdf_load_stackoverflow
Inventor
Toshihiko Fukuyama
Shintarou Yanagisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP2252778A priority Critical patent/JPS54115064A/ja
Priority to US06/015,896 priority patent/US4218291A/en
Publication of JPS54115064A publication Critical patent/JPS54115064A/ja
Publication of JPS6136375B2 publication Critical patent/JPS6136375B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP2252778A 1978-02-28 1978-02-28 Method of forming metal film Granted JPS54115064A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2252778A JPS54115064A (en) 1978-02-28 1978-02-28 Method of forming metal film
US06/015,896 US4218291A (en) 1978-02-28 1979-02-28 Process for forming metal and metal silicide films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2252778A JPS54115064A (en) 1978-02-28 1978-02-28 Method of forming metal film

Publications (2)

Publication Number Publication Date
JPS54115064A true JPS54115064A (en) 1979-09-07
JPS6136375B2 JPS6136375B2 (enrdf_load_stackoverflow) 1986-08-18

Family

ID=12085255

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2252778A Granted JPS54115064A (en) 1978-02-28 1978-02-28 Method of forming metal film

Country Status (1)

Country Link
JP (1) JPS54115064A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59108348A (ja) * 1982-12-01 1984-06-22 シ−メンス，アクチエンゲゼルシヤフト 集積半導体回路
JPS62237724A (ja) * 1986-04-07 1987-10-17 Mitsubishi Electric Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59108348A (ja) * 1982-12-01 1984-06-22 シ−メンス，アクチエンゲゼルシヤフト 集積半導体回路
JPS62237724A (ja) * 1986-04-07 1987-10-17 Mitsubishi Electric Corp 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS6136375B2 (enrdf_load_stackoverflow) 1986-08-18

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