JPS5410678A - Nonnthermal electron beam processor - Google Patents
Nonnthermal electron beam processorInfo
- Publication number
- JPS5410678A JPS5410678A JP7454677A JP7454677A JPS5410678A JP S5410678 A JPS5410678 A JP S5410678A JP 7454677 A JP7454677 A JP 7454677A JP 7454677 A JP7454677 A JP 7454677A JP S5410678 A JPS5410678 A JP S5410678A
- Authority
- JP
- Japan
- Prior art keywords
- nonnthermal
- electron beam
- beam processor
- processor
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7454677A JPS5410678A (en) | 1977-06-24 | 1977-06-24 | Nonnthermal electron beam processor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7454677A JPS5410678A (en) | 1977-06-24 | 1977-06-24 | Nonnthermal electron beam processor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5410678A true JPS5410678A (en) | 1979-01-26 |
Family
ID=13550352
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7454677A Pending JPS5410678A (en) | 1977-06-24 | 1977-06-24 | Nonnthermal electron beam processor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5410678A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5251871A (en) * | 1975-10-23 | 1977-04-26 | Rikagaku Kenkyusho | Projecting method for charge particle beams |
-
1977
- 1977-06-24 JP JP7454677A patent/JPS5410678A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5251871A (en) * | 1975-10-23 | 1977-04-26 | Rikagaku Kenkyusho | Projecting method for charge particle beams |
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