JPS5410678A - Nonnthermal electron beam processor - Google Patents

Nonnthermal electron beam processor

Info

Publication number
JPS5410678A
JPS5410678A JP7454677A JP7454677A JPS5410678A JP S5410678 A JPS5410678 A JP S5410678A JP 7454677 A JP7454677 A JP 7454677A JP 7454677 A JP7454677 A JP 7454677A JP S5410678 A JPS5410678 A JP S5410678A
Authority
JP
Japan
Prior art keywords
nonnthermal
electron beam
beam processor
processor
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7454677A
Other languages
Japanese (ja)
Inventor
Haan Eberuharuto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Priority to JP7454677A priority Critical patent/JPS5410678A/en
Publication of JPS5410678A publication Critical patent/JPS5410678A/en
Pending legal-status Critical Current

Links

JP7454677A 1977-06-24 1977-06-24 Nonnthermal electron beam processor Pending JPS5410678A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7454677A JPS5410678A (en) 1977-06-24 1977-06-24 Nonnthermal electron beam processor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7454677A JPS5410678A (en) 1977-06-24 1977-06-24 Nonnthermal electron beam processor

Publications (1)

Publication Number Publication Date
JPS5410678A true JPS5410678A (en) 1979-01-26

Family

ID=13550352

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7454677A Pending JPS5410678A (en) 1977-06-24 1977-06-24 Nonnthermal electron beam processor

Country Status (1)

Country Link
JP (1) JPS5410678A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5251871A (en) * 1975-10-23 1977-04-26 Rikagaku Kenkyusho Projecting method for charge particle beams

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