JPS54104464A - Etching method - Google Patents
Etching methodInfo
- Publication number
- JPS54104464A JPS54104464A JP1276578A JP1276578A JPS54104464A JP S54104464 A JPS54104464 A JP S54104464A JP 1276578 A JP1276578 A JP 1276578A JP 1276578 A JP1276578 A JP 1276578A JP S54104464 A JPS54104464 A JP S54104464A
- Authority
- JP
- Japan
- Prior art keywords
- etching method
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1276578A JPS54104464A (en) | 1978-02-06 | 1978-02-06 | Etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1276578A JPS54104464A (en) | 1978-02-06 | 1978-02-06 | Etching method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54104464A true JPS54104464A (en) | 1979-08-16 |
Family
ID=11814485
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1276578A Pending JPS54104464A (en) | 1978-02-06 | 1978-02-06 | Etching method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54104464A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57198263A (en) * | 1981-05-29 | 1982-12-04 | Fujitsu Ltd | Etching method |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52125431A (en) * | 1976-04-15 | 1977-10-21 | Fujitsu Ltd | Dry etching method |
-
1978
- 1978-02-06 JP JP1276578A patent/JPS54104464A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52125431A (en) * | 1976-04-15 | 1977-10-21 | Fujitsu Ltd | Dry etching method |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57198263A (en) * | 1981-05-29 | 1982-12-04 | Fujitsu Ltd | Etching method |
JPH0135078B2 (en) * | 1981-05-29 | 1989-07-24 | Fujitsu Ltd |
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