JPS54104464A - Etching method - Google Patents

Etching method

Info

Publication number
JPS54104464A
JPS54104464A JP1276578A JP1276578A JPS54104464A JP S54104464 A JPS54104464 A JP S54104464A JP 1276578 A JP1276578 A JP 1276578A JP 1276578 A JP1276578 A JP 1276578A JP S54104464 A JPS54104464 A JP S54104464A
Authority
JP
Japan
Prior art keywords
etching method
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1276578A
Other languages
Japanese (ja)
Inventor
Kazuo Kamimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHO LSI GIJUTSU KENKYU KUMIAI
Priority to JP1276578A priority Critical patent/JPS54104464A/en
Publication of JPS54104464A publication Critical patent/JPS54104464A/en
Pending legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
JP1276578A 1978-02-06 1978-02-06 Etching method Pending JPS54104464A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1276578A JPS54104464A (en) 1978-02-06 1978-02-06 Etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1276578A JPS54104464A (en) 1978-02-06 1978-02-06 Etching method

Publications (1)

Publication Number Publication Date
JPS54104464A true JPS54104464A (en) 1979-08-16

Family

ID=11814485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1276578A Pending JPS54104464A (en) 1978-02-06 1978-02-06 Etching method

Country Status (1)

Country Link
JP (1) JPS54104464A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57198263A (en) * 1981-05-29 1982-12-04 Fujitsu Ltd Etching method

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52125431A (en) * 1976-04-15 1977-10-21 Fujitsu Ltd Dry etching method

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52125431A (en) * 1976-04-15 1977-10-21 Fujitsu Ltd Dry etching method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57198263A (en) * 1981-05-29 1982-12-04 Fujitsu Ltd Etching method
JPH0135078B2 (en) * 1981-05-29 1989-07-24 Fujitsu Ltd

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