JPS539836B2 - - Google Patents

Info

Publication number
JPS539836B2
JPS539836B2 JP291873A JP291873A JPS539836B2 JP S539836 B2 JPS539836 B2 JP S539836B2 JP 291873 A JP291873 A JP 291873A JP 291873 A JP291873 A JP 291873A JP S539836 B2 JPS539836 B2 JP S539836B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP291873A
Other languages
Japanese (ja)
Other versions
JPS4987277A (en:Method
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP291873A priority Critical patent/JPS539836B2/ja
Publication of JPS4987277A publication Critical patent/JPS4987277A/ja
Publication of JPS539836B2 publication Critical patent/JPS539836B2/ja
Expired legal-status Critical Current

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  • Dicing (AREA)
JP291873A 1972-12-22 1972-12-22 Expired JPS539836B2 (en:Method)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP291873A JPS539836B2 (en:Method) 1972-12-22 1972-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP291873A JPS539836B2 (en:Method) 1972-12-22 1972-12-22

Publications (2)

Publication Number Publication Date
JPS4987277A JPS4987277A (en:Method) 1974-08-21
JPS539836B2 true JPS539836B2 (en:Method) 1978-04-08

Family

ID=11542718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP291873A Expired JPS539836B2 (en:Method) 1972-12-22 1972-12-22

Country Status (1)

Country Link
JP (1) JPS539836B2 (en:Method)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54137274A (en) * 1978-04-17 1979-10-24 Nec Corp Manufacture of beam lead structure semiconductor device
JPS6042846A (ja) * 1983-08-18 1985-03-07 Nec Kansai Ltd 半導体ウエ−ハダイシング方法

Also Published As

Publication number Publication date
JPS4987277A (en:Method) 1974-08-21

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