JPS5392669A - Soft x-ray transcribing device - Google Patents
Soft x-ray transcribing deviceInfo
- Publication number
- JPS5392669A JPS5392669A JP678177A JP678177A JPS5392669A JP S5392669 A JPS5392669 A JP S5392669A JP 678177 A JP678177 A JP 678177A JP 678177 A JP678177 A JP 678177A JP S5392669 A JPS5392669 A JP S5392669A
- Authority
- JP
- Japan
- Prior art keywords
- ray
- soft
- transcribing device
- transcribing
- lighography
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP678177A JPS5392669A (en) | 1977-01-26 | 1977-01-26 | Soft x-ray transcribing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP678177A JPS5392669A (en) | 1977-01-26 | 1977-01-26 | Soft x-ray transcribing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5392669A true JPS5392669A (en) | 1978-08-14 |
JPS6135694B2 JPS6135694B2 (ja) | 1986-08-14 |
Family
ID=11647704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP678177A Granted JPS5392669A (en) | 1977-01-26 | 1977-01-26 | Soft x-ray transcribing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5392669A (ja) |
-
1977
- 1977-01-26 JP JP678177A patent/JPS5392669A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6135694B2 (ja) | 1986-08-14 |
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