JPS5390886A - Wiring structure - Google Patents

Wiring structure

Info

Publication number
JPS5390886A
JPS5390886A JP492277A JP492277A JPS5390886A JP S5390886 A JPS5390886 A JP S5390886A JP 492277 A JP492277 A JP 492277A JP 492277 A JP492277 A JP 492277A JP S5390886 A JPS5390886 A JP S5390886A
Authority
JP
Japan
Prior art keywords
wiring structure
connecting parts
making
distance
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP492277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6146973B2 (cs
Inventor
Yoshio Honma
Hisao Nozawa
Tadao Kachi
Yukiyoshi Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP492277A priority Critical patent/JPS5390886A/ja
Publication of JPS5390886A publication Critical patent/JPS5390886A/ja
Publication of JPS6146973B2 publication Critical patent/JPS6146973B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Production Of Multi-Layered Print Wiring Board (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Electrodes Of Semiconductors (AREA)
JP492277A 1977-01-21 1977-01-21 Wiring structure Granted JPS5390886A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP492277A JPS5390886A (en) 1977-01-21 1977-01-21 Wiring structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP492277A JPS5390886A (en) 1977-01-21 1977-01-21 Wiring structure

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP60093605A Division JPS60258937A (ja) 1985-05-02 1985-05-02 配線構造体の製造方法

Publications (2)

Publication Number Publication Date
JPS5390886A true JPS5390886A (en) 1978-08-10
JPS6146973B2 JPS6146973B2 (cs) 1986-10-16

Family

ID=11597096

Family Applications (1)

Application Number Title Priority Date Filing Date
JP492277A Granted JPS5390886A (en) 1977-01-21 1977-01-21 Wiring structure

Country Status (1)

Country Link
JP (1) JPS5390886A (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57133674A (en) * 1981-02-13 1982-08-18 Hitachi Ltd Structure of multilayer wiring
US5266835A (en) * 1988-02-02 1993-11-30 National Semiconductor Corporation Semiconductor structure having a barrier layer disposed within openings of a dielectric layer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57133674A (en) * 1981-02-13 1982-08-18 Hitachi Ltd Structure of multilayer wiring
US5266835A (en) * 1988-02-02 1993-11-30 National Semiconductor Corporation Semiconductor structure having a barrier layer disposed within openings of a dielectric layer

Also Published As

Publication number Publication date
JPS6146973B2 (cs) 1986-10-16

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