JPS5384553A - Ion injection method of multiplex channeling - Google Patents
Ion injection method of multiplex channelingInfo
- Publication number
- JPS5384553A JPS5384553A JP16029076A JP16029076A JPS5384553A JP S5384553 A JPS5384553 A JP S5384553A JP 16029076 A JP16029076 A JP 16029076A JP 16029076 A JP16029076 A JP 16029076A JP S5384553 A JPS5384553 A JP S5384553A
- Authority
- JP
- Japan
- Prior art keywords
- channeling
- multiplex
- ion injection
- injection method
- injection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To form a given impurity distribution, by keeping the acceleration voltage constant, and by combinating multiply the impurity distribution obtained by changing the angle of injection and the quantity of injection in the range of channeling phanomenon caused to the crystal axis of low index for the direction of ion injection.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16029076A JPS5384553A (en) | 1976-12-29 | 1976-12-29 | Ion injection method of multiplex channeling |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16029076A JPS5384553A (en) | 1976-12-29 | 1976-12-29 | Ion injection method of multiplex channeling |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5384553A true JPS5384553A (en) | 1978-07-26 |
Family
ID=15711777
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16029076A Pending JPS5384553A (en) | 1976-12-29 | 1976-12-29 | Ion injection method of multiplex channeling |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5384553A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047359A (en) * | 1985-12-17 | 1991-09-10 | Mitsubishi Denki Kabushiki Kaisha | Method of implanting into the sidewall of a trench by rotating the wafer |
-
1976
- 1976-12-29 JP JP16029076A patent/JPS5384553A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5047359A (en) * | 1985-12-17 | 1991-09-10 | Mitsubishi Denki Kabushiki Kaisha | Method of implanting into the sidewall of a trench by rotating the wafer |
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