JPS5384553A - Ion injection method of multiplex channeling - Google Patents

Ion injection method of multiplex channeling

Info

Publication number
JPS5384553A
JPS5384553A JP16029076A JP16029076A JPS5384553A JP S5384553 A JPS5384553 A JP S5384553A JP 16029076 A JP16029076 A JP 16029076A JP 16029076 A JP16029076 A JP 16029076A JP S5384553 A JPS5384553 A JP S5384553A
Authority
JP
Japan
Prior art keywords
channeling
multiplex
ion injection
injection method
injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16029076A
Other languages
Japanese (ja)
Inventor
Tsuguo Fukuda
Hidetoshi Nishi
Teruo Sakurai
Tsuneo Furuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16029076A priority Critical patent/JPS5384553A/en
Publication of JPS5384553A publication Critical patent/JPS5384553A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To form a given impurity distribution, by keeping the acceleration voltage constant, and by combinating multiply the impurity distribution obtained by changing the angle of injection and the quantity of injection in the range of channeling phanomenon caused to the crystal axis of low index for the direction of ion injection.
JP16029076A 1976-12-29 1976-12-29 Ion injection method of multiplex channeling Pending JPS5384553A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16029076A JPS5384553A (en) 1976-12-29 1976-12-29 Ion injection method of multiplex channeling

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16029076A JPS5384553A (en) 1976-12-29 1976-12-29 Ion injection method of multiplex channeling

Publications (1)

Publication Number Publication Date
JPS5384553A true JPS5384553A (en) 1978-07-26

Family

ID=15711777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16029076A Pending JPS5384553A (en) 1976-12-29 1976-12-29 Ion injection method of multiplex channeling

Country Status (1)

Country Link
JP (1) JPS5384553A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5047359A (en) * 1985-12-17 1991-09-10 Mitsubishi Denki Kabushiki Kaisha Method of implanting into the sidewall of a trench by rotating the wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5047359A (en) * 1985-12-17 1991-09-10 Mitsubishi Denki Kabushiki Kaisha Method of implanting into the sidewall of a trench by rotating the wafer

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