JPS5425193A - Period adjusting method of evaporation type - Google Patents

Period adjusting method of evaporation type

Info

Publication number
JPS5425193A
JPS5425193A JP9059377A JP9059377A JPS5425193A JP S5425193 A JPS5425193 A JP S5425193A JP 9059377 A JP9059377 A JP 9059377A JP 9059377 A JP9059377 A JP 9059377A JP S5425193 A JPS5425193 A JP S5425193A
Authority
JP
Japan
Prior art keywords
adjusting method
evaporation type
period adjusting
period
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9059377A
Other languages
Japanese (ja)
Inventor
Takaaki Matsuo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Suwa Seikosha KK
Original Assignee
Seiko Epson Corp
Suwa Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp, Suwa Seikosha KK filed Critical Seiko Epson Corp
Priority to JP9059377A priority Critical patent/JPS5425193A/en
Publication of JPS5425193A publication Critical patent/JPS5425193A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Physical Vapour Deposition (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To increase the period adjusting accuracy, by adjusting the evaporation speed, through the calculation of the difference between the changing rate of the period of the oscillator under period adjustment and that predetermined, with evaporation.
JP9059377A 1977-07-28 1977-07-28 Period adjusting method of evaporation type Pending JPS5425193A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9059377A JPS5425193A (en) 1977-07-28 1977-07-28 Period adjusting method of evaporation type

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9059377A JPS5425193A (en) 1977-07-28 1977-07-28 Period adjusting method of evaporation type

Publications (1)

Publication Number Publication Date
JPS5425193A true JPS5425193A (en) 1979-02-24

Family

ID=14002751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9059377A Pending JPS5425193A (en) 1977-07-28 1977-07-28 Period adjusting method of evaporation type

Country Status (1)

Country Link
JP (1) JPS5425193A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0613130A (en) * 1992-02-27 1994-01-21 Harting Elektron Gmbh Electric-plug coupling device having half part of casing which can be engaged

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0613130A (en) * 1992-02-27 1994-01-21 Harting Elektron Gmbh Electric-plug coupling device having half part of casing which can be engaged

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