JPS5381940A - Method of making thin film capacitor element - Google Patents

Method of making thin film capacitor element

Info

Publication number
JPS5381940A
JPS5381940A JP15650876A JP15650876A JPS5381940A JP S5381940 A JPS5381940 A JP S5381940A JP 15650876 A JP15650876 A JP 15650876A JP 15650876 A JP15650876 A JP 15650876A JP S5381940 A JPS5381940 A JP S5381940A
Authority
JP
Japan
Prior art keywords
thin film
capacitor element
film capacitor
making thin
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15650876A
Other languages
Japanese (ja)
Other versions
JPS6051250B2 (en
Inventor
Saburou Umeda
Hirosuke Kurihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15650876A priority Critical patent/JPS6051250B2/en
Publication of JPS5381940A publication Critical patent/JPS5381940A/en
Publication of JPS6051250B2 publication Critical patent/JPS6051250B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)
JP15650876A 1976-12-27 1976-12-27 Manufacturing method of thin film capacitive element Expired JPS6051250B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15650876A JPS6051250B2 (en) 1976-12-27 1976-12-27 Manufacturing method of thin film capacitive element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15650876A JPS6051250B2 (en) 1976-12-27 1976-12-27 Manufacturing method of thin film capacitive element

Publications (2)

Publication Number Publication Date
JPS5381940A true JPS5381940A (en) 1978-07-19
JPS6051250B2 JPS6051250B2 (en) 1985-11-13

Family

ID=15629286

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15650876A Expired JPS6051250B2 (en) 1976-12-27 1976-12-27 Manufacturing method of thin film capacitive element

Country Status (1)

Country Link
JP (1) JPS6051250B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008053318A (en) * 2006-08-22 2008-03-06 Nec Electronics Corp Insulating film forming method and method of manufacturing semiconductor device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008053318A (en) * 2006-08-22 2008-03-06 Nec Electronics Corp Insulating film forming method and method of manufacturing semiconductor device

Also Published As

Publication number Publication date
JPS6051250B2 (en) 1985-11-13

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