JPS5376755A - Modulation method of plasma density - Google Patents

Modulation method of plasma density

Info

Publication number
JPS5376755A
JPS5376755A JP15190576A JP15190576A JPS5376755A JP S5376755 A JPS5376755 A JP S5376755A JP 15190576 A JP15190576 A JP 15190576A JP 15190576 A JP15190576 A JP 15190576A JP S5376755 A JPS5376755 A JP S5376755A
Authority
JP
Japan
Prior art keywords
modulation method
plasma density
sensity
plasmas
ultrasonic waves
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15190576A
Other languages
English (en)
Japanese (ja)
Other versions
JPS574093B2 (fr
Inventor
Kenichi Kobayashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15190576A priority Critical patent/JPS5376755A/ja
Publication of JPS5376755A publication Critical patent/JPS5376755A/ja
Publication of JPS574093B2 publication Critical patent/JPS574093B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
JP15190576A 1976-12-20 1976-12-20 Modulation method of plasma density Granted JPS5376755A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15190576A JPS5376755A (en) 1976-12-20 1976-12-20 Modulation method of plasma density

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15190576A JPS5376755A (en) 1976-12-20 1976-12-20 Modulation method of plasma density

Publications (2)

Publication Number Publication Date
JPS5376755A true JPS5376755A (en) 1978-07-07
JPS574093B2 JPS574093B2 (fr) 1982-01-25

Family

ID=15528748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15190576A Granted JPS5376755A (en) 1976-12-20 1976-12-20 Modulation method of plasma density

Country Status (1)

Country Link
JP (1) JPS5376755A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04111313A (ja) * 1990-08-31 1992-04-13 Mitsubishi Electric Corp 微細加工装置及び方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173803U (fr) * 1985-04-19 1986-10-29

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04111313A (ja) * 1990-08-31 1992-04-13 Mitsubishi Electric Corp 微細加工装置及び方法

Also Published As

Publication number Publication date
JPS574093B2 (fr) 1982-01-25

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