JPS5371690A - Manufacturing apparatus for band type silicon crystal - Google Patents

Manufacturing apparatus for band type silicon crystal

Info

Publication number
JPS5371690A
JPS5371690A JP14657476A JP14657476A JPS5371690A JP S5371690 A JPS5371690 A JP S5371690A JP 14657476 A JP14657476 A JP 14657476A JP 14657476 A JP14657476 A JP 14657476A JP S5371690 A JPS5371690 A JP S5371690A
Authority
JP
Japan
Prior art keywords
type silicon
silicon crystal
band type
manufacturing apparatus
capillarity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14657476A
Other languages
English (en)
Japanese (ja)
Other versions
JPS544914B2 (OSRAM
Inventor
Naoaki Maki
Hiroshi Ito
Toshiro Matsui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP14657476A priority Critical patent/JPS5371690A/ja
Publication of JPS5371690A publication Critical patent/JPS5371690A/ja
Publication of JPS544914B2 publication Critical patent/JPS544914B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP14657476A 1976-12-08 1976-12-08 Manufacturing apparatus for band type silicon crystal Granted JPS5371690A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14657476A JPS5371690A (en) 1976-12-08 1976-12-08 Manufacturing apparatus for band type silicon crystal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14657476A JPS5371690A (en) 1976-12-08 1976-12-08 Manufacturing apparatus for band type silicon crystal

Publications (2)

Publication Number Publication Date
JPS5371690A true JPS5371690A (en) 1978-06-26
JPS544914B2 JPS544914B2 (OSRAM) 1979-03-12

Family

ID=15410759

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14657476A Granted JPS5371690A (en) 1976-12-08 1976-12-08 Manufacturing apparatus for band type silicon crystal

Country Status (1)

Country Link
JP (1) JPS5371690A (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51146573A (en) * 1975-06-10 1976-12-16 Asahi Chemical Ind Method of producing film excellent in dimensional stability

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51146573A (en) * 1975-06-10 1976-12-16 Asahi Chemical Ind Method of producing film excellent in dimensional stability

Also Published As

Publication number Publication date
JPS544914B2 (OSRAM) 1979-03-12

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