JPS5367352A - Measuring method of resistivity for double-layer film - Google Patents

Measuring method of resistivity for double-layer film

Info

Publication number
JPS5367352A
JPS5367352A JP14275976A JP14275976A JPS5367352A JP S5367352 A JPS5367352 A JP S5367352A JP 14275976 A JP14275976 A JP 14275976A JP 14275976 A JP14275976 A JP 14275976A JP S5367352 A JPS5367352 A JP S5367352A
Authority
JP
Japan
Prior art keywords
resistivity
layer film
double
measuring method
simultaneous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14275976A
Other languages
English (en)
Japanese (ja)
Other versions
JPS566144B2 (enExample
Inventor
Masuji Sato
Yoshio Shiozaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14275976A priority Critical patent/JPS5367352A/ja
Publication of JPS5367352A publication Critical patent/JPS5367352A/ja
Publication of JPS566144B2 publication Critical patent/JPS566144B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Resistance Or Impedance (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP14275976A 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film Granted JPS5367352A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14275976A JPS5367352A (en) 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14275976A JPS5367352A (en) 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film

Publications (2)

Publication Number Publication Date
JPS5367352A true JPS5367352A (en) 1978-06-15
JPS566144B2 JPS566144B2 (enExample) 1981-02-09

Family

ID=15322904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14275976A Granted JPS5367352A (en) 1976-11-27 1976-11-27 Measuring method of resistivity for double-layer film

Country Status (1)

Country Link
JP (1) JPS5367352A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58145140A (ja) * 1982-02-23 1983-08-29 Nec Corp 半導体特性測定装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58145140A (ja) * 1982-02-23 1983-08-29 Nec Corp 半導体特性測定装置

Also Published As

Publication number Publication date
JPS566144B2 (enExample) 1981-02-09

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