JPS5364092A - Element analyzer - Google Patents

Element analyzer

Info

Publication number
JPS5364092A
JPS5364092A JP13833376A JP13833376A JPS5364092A JP S5364092 A JPS5364092 A JP S5364092A JP 13833376 A JP13833376 A JP 13833376A JP 13833376 A JP13833376 A JP 13833376A JP S5364092 A JPS5364092 A JP S5364092A
Authority
JP
Japan
Prior art keywords
element analyzer
indicating
frame
crt
signal due
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13833376A
Other languages
Japanese (ja)
Inventor
Kiyoshi Ishikawa
Sumitaka Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13833376A priority Critical patent/JPS5364092A/en
Publication of JPS5364092A publication Critical patent/JPS5364092A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To correctly confirm the analyzing position by indicating a frame in a CRT and by indicating the brightness signal due to Auger electrons within the frame.
JP13833376A 1976-11-19 1976-11-19 Element analyzer Pending JPS5364092A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13833376A JPS5364092A (en) 1976-11-19 1976-11-19 Element analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13833376A JPS5364092A (en) 1976-11-19 1976-11-19 Element analyzer

Publications (1)

Publication Number Publication Date
JPS5364092A true JPS5364092A (en) 1978-06-08

Family

ID=15219446

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13833376A Pending JPS5364092A (en) 1976-11-19 1976-11-19 Element analyzer

Country Status (1)

Country Link
JP (1) JPS5364092A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60218845A (en) * 1984-04-16 1985-11-01 Hitachi Ltd Apparatus for testing foreign matter

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60218845A (en) * 1984-04-16 1985-11-01 Hitachi Ltd Apparatus for testing foreign matter
JPH0458622B2 (en) * 1984-04-16 1992-09-18 Hitachi Ltd

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