JPS5348491A - Production of semiconductor device - Google Patents

Production of semiconductor device

Info

Publication number
JPS5348491A
JPS5348491A JP12278276A JP12278276A JPS5348491A JP S5348491 A JPS5348491 A JP S5348491A JP 12278276 A JP12278276 A JP 12278276A JP 12278276 A JP12278276 A JP 12278276A JP S5348491 A JPS5348491 A JP S5348491A
Authority
JP
Japan
Prior art keywords
production
semiconductor device
isolation
increase
twice
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12278276A
Other languages
English (en)
Inventor
Keijiro Uehara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12278276A priority Critical patent/JPS5348491A/ja
Publication of JPS5348491A publication Critical patent/JPS5348491A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP12278276A 1976-10-15 1976-10-15 Production of semiconductor device Pending JPS5348491A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12278276A JPS5348491A (en) 1976-10-15 1976-10-15 Production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12278276A JPS5348491A (en) 1976-10-15 1976-10-15 Production of semiconductor device

Publications (1)

Publication Number Publication Date
JPS5348491A true JPS5348491A (en) 1978-05-01

Family

ID=14844462

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12278276A Pending JPS5348491A (en) 1976-10-15 1976-10-15 Production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5348491A (ja)

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