JPS5348073B2 - - Google Patents

Info

Publication number
JPS5348073B2
JPS5348073B2 JP9997372A JP9997372A JPS5348073B2 JP S5348073 B2 JPS5348073 B2 JP S5348073B2 JP 9997372 A JP9997372 A JP 9997372A JP 9997372 A JP9997372 A JP 9997372A JP S5348073 B2 JPS5348073 B2 JP S5348073B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9997372A
Other languages
Japanese (ja)
Other versions
JPS4860574A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS4860574A publication Critical patent/JPS4860574A/ja
Publication of JPS5348073B2 publication Critical patent/JPS5348073B2/ja
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/2205—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities from the substrate during epitaxy, e.g. autodoping; Preventing or using autodoping

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Bipolar Transistors (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Element Separation (AREA)
JP9997372A 1971-11-22 1972-10-06 Expired JPS5348073B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20102471A 1971-11-22 1971-11-22

Publications (2)

Publication Number Publication Date
JPS4860574A JPS4860574A (en) 1973-08-24
JPS5348073B2 true JPS5348073B2 (en) 1978-12-26

Family

ID=22744168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9997372A Expired JPS5348073B2 (en) 1971-11-22 1972-10-06

Country Status (4)

Country Link
JP (1) JPS5348073B2 (en)
DE (1) DE2250990A1 (en)
FR (1) FR2160830B1 (en)
GB (1) GB1372779A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5410667A (en) * 1977-06-27 1979-01-26 Hitachi Ltd Semiconductor device
NL8006827A (en) * 1980-12-17 1982-07-16 Philips Nv METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
JPS57128953A (en) * 1981-02-02 1982-08-10 Matsushita Electric Ind Co Ltd Manufacture of semiconductor integrated circuit

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3328213A (en) * 1963-11-26 1967-06-27 Int Rectifier Corp Method for growing silicon film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3328213A (en) * 1963-11-26 1967-06-27 Int Rectifier Corp Method for growing silicon film

Also Published As

Publication number Publication date
GB1372779A (en) 1974-11-06
JPS4860574A (en) 1973-08-24
FR2160830A1 (en) 1973-07-06
DE2250990A1 (en) 1973-05-24
FR2160830B1 (en) 1974-08-19

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