FR2160830B1 - - Google Patents

Info

Publication number
FR2160830B1
FR2160830B1 FR7238491A FR7238491A FR2160830B1 FR 2160830 B1 FR2160830 B1 FR 2160830B1 FR 7238491 A FR7238491 A FR 7238491A FR 7238491 A FR7238491 A FR 7238491A FR 2160830 B1 FR2160830 B1 FR 2160830B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7238491A
Other versions
FR2160830A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2160830A1 publication Critical patent/FR2160830A1/fr
Application granted granted Critical
Publication of FR2160830B1 publication Critical patent/FR2160830B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/74—Making of localized buried regions, e.g. buried collector layers, internal connections substrate contacts
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/22—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities
    • H01L21/2205—Diffusion of impurity materials, e.g. doping materials, electrode materials, into or out of a semiconductor body, or between semiconductor regions; Interactions between two or more impurities; Redistribution of impurities from the substrate during epitaxy, e.g. autodoping; Preventing or using autodoping

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Element Separation (AREA)
  • Bipolar Transistors (AREA)
FR7238491A 1971-11-22 1972-10-25 Expired FR2160830B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US20102471A 1971-11-22 1971-11-22

Publications (2)

Publication Number Publication Date
FR2160830A1 FR2160830A1 (fr) 1973-07-06
FR2160830B1 true FR2160830B1 (fr) 1974-08-19

Family

ID=22744168

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7238491A Expired FR2160830B1 (fr) 1971-11-22 1972-10-25

Country Status (4)

Country Link
JP (1) JPS5348073B2 (fr)
DE (1) DE2250990A1 (fr)
FR (1) FR2160830B1 (fr)
GB (1) GB1372779A (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5410667A (en) * 1977-06-27 1979-01-26 Hitachi Ltd Semiconductor device
NL8006827A (nl) * 1980-12-17 1982-07-16 Philips Nv Werkwijze voor het vervaardigen van een halfgeleiderinrichting.
JPS57128953A (en) * 1981-02-02 1982-08-10 Matsushita Electric Ind Co Ltd Manufacture of semiconductor integrated circuit

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1051562A (fr) * 1963-11-26

Also Published As

Publication number Publication date
JPS5348073B2 (fr) 1978-12-26
DE2250990A1 (de) 1973-05-24
GB1372779A (en) 1974-11-06
JPS4860574A (fr) 1973-08-24
FR2160830A1 (fr) 1973-07-06

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Legal Events

Date Code Title Description
ST Notification of lapse