JPS5347162B2 - - Google Patents
Info
- Publication number
- JPS5347162B2 JPS5347162B2 JP6227476A JP6227476A JPS5347162B2 JP S5347162 B2 JPS5347162 B2 JP S5347162B2 JP 6227476 A JP6227476 A JP 6227476A JP 6227476 A JP6227476 A JP 6227476A JP S5347162 B2 JPS5347162 B2 JP S5347162B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6227476A JPS52146218A (en) | 1976-05-31 | 1976-05-31 | Positive type radiation sensitive material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6227476A JPS52146218A (en) | 1976-05-31 | 1976-05-31 | Positive type radiation sensitive material |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52146218A JPS52146218A (en) | 1977-12-05 |
| JPS5347162B2 true JPS5347162B2 (lt) | 1978-12-19 |
Family
ID=13195391
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6227476A Granted JPS52146218A (en) | 1976-05-31 | 1976-05-31 | Positive type radiation sensitive material |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52146218A (lt) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001125268A (ja) * | 1999-10-28 | 2001-05-11 | Sony Corp | 露光方法 |
| JP5741518B2 (ja) * | 2012-04-24 | 2015-07-01 | 信越化学工業株式会社 | レジスト下層膜材料及びパターン形成方法 |
| JP5913077B2 (ja) * | 2012-12-18 | 2016-04-27 | 信越化学工業株式会社 | ポジ型レジスト材料及びこれを用いたパターン形成方法 |
| WO2016035555A1 (ja) * | 2014-09-02 | 2016-03-10 | 富士フイルム株式会社 | 非化学増幅型レジスト組成物、非化学増幅型レジスト膜、パターン形成方法、及び、電子デバイスの製造方法 |
-
1976
- 1976-05-31 JP JP6227476A patent/JPS52146218A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52146218A (en) | 1977-12-05 |