JPS5346694B2 - - Google Patents
Info
- Publication number
- JPS5346694B2 JPS5346694B2 JP9404776A JP9404776A JPS5346694B2 JP S5346694 B2 JPS5346694 B2 JP S5346694B2 JP 9404776 A JP9404776 A JP 9404776A JP 9404776 A JP9404776 A JP 9404776A JP S5346694 B2 JPS5346694 B2 JP S5346694B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9404776A JPS5319764A (en) | 1976-08-09 | 1976-08-09 | Mark detection system in electron beam exposure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9404776A JPS5319764A (en) | 1976-08-09 | 1976-08-09 | Mark detection system in electron beam exposure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5319764A JPS5319764A (en) | 1978-02-23 |
| JPS5346694B2 true JPS5346694B2 (enExample) | 1978-12-15 |
Family
ID=14099638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9404776A Granted JPS5319764A (en) | 1976-08-09 | 1976-08-09 | Mark detection system in electron beam exposure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5319764A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56162837A (en) * | 1980-05-20 | 1981-12-15 | Nec Corp | Electron beam exposure device |
| JPS5783175A (en) * | 1980-11-12 | 1982-05-24 | Mitsubishi Electric Corp | Phase rotation change-over device for inverter |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3924113A (en) * | 1973-06-08 | 1975-12-02 | Ibm | Electron beam registration system |
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1976
- 1976-08-09 JP JP9404776A patent/JPS5319764A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5319764A (en) | 1978-02-23 |