JPS5346692B2 - - Google Patents

Info

Publication number
JPS5346692B2
JPS5346692B2 JP14562575A JP14562575A JPS5346692B2 JP S5346692 B2 JPS5346692 B2 JP S5346692B2 JP 14562575 A JP14562575 A JP 14562575A JP 14562575 A JP14562575 A JP 14562575A JP S5346692 B2 JPS5346692 B2 JP S5346692B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14562575A
Other languages
Japanese (ja)
Other versions
JPS5269269A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14562575A priority Critical patent/JPS5269269A/ja
Publication of JPS5269269A publication Critical patent/JPS5269269A/ja
Publication of JPS5346692B2 publication Critical patent/JPS5346692B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP14562575A 1975-12-05 1975-12-05 Photomask Granted JPS5269269A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14562575A JPS5269269A (en) 1975-12-05 1975-12-05 Photomask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14562575A JPS5269269A (en) 1975-12-05 1975-12-05 Photomask

Publications (2)

Publication Number Publication Date
JPS5269269A JPS5269269A (en) 1977-06-08
JPS5346692B2 true JPS5346692B2 (enrdf_load_stackoverflow) 1978-12-15

Family

ID=15389329

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14562575A Granted JPS5269269A (en) 1975-12-05 1975-12-05 Photomask

Country Status (1)

Country Link
JP (1) JPS5269269A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61173251A (ja) * 1985-01-28 1986-08-04 Mitsubishi Electric Corp フオトマスクの製造方法
JPS6252550A (ja) * 1985-08-30 1987-03-07 Mitsubishi Electric Corp フオトマスク材料
JPS6252551A (ja) * 1985-08-30 1987-03-07 Mitsubishi Electric Corp フオトマスク材料

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4948269A (enrdf_load_stackoverflow) * 1972-09-14 1974-05-10

Also Published As

Publication number Publication date
JPS5269269A (en) 1977-06-08

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