JPS5346486A - Evaporating apparatus - Google Patents

Evaporating apparatus

Info

Publication number
JPS5346486A
JPS5346486A JP12101376A JP12101376A JPS5346486A JP S5346486 A JPS5346486 A JP S5346486A JP 12101376 A JP12101376 A JP 12101376A JP 12101376 A JP12101376 A JP 12101376A JP S5346486 A JPS5346486 A JP S5346486A
Authority
JP
Japan
Prior art keywords
infrared rays
evaporating apparatus
specified
substrate
temperatue
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP12101376A
Other languages
Japanese (ja)
Inventor
Katsuhiro Shimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12101376A priority Critical patent/JPS5346486A/en
Publication of JPS5346486A publication Critical patent/JPS5346486A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process

Abstract

PURPOSE:To measure accurately the temperatue of the specified substrate during the evaporation, by managing to lead only the ray of the specified wavelength among the infrared rays radiated from the substrate to the detector of infrared rays outside the vacuum tank by using the mirror window.
JP12101376A 1976-10-08 1976-10-08 Evaporating apparatus Pending JPS5346486A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12101376A JPS5346486A (en) 1976-10-08 1976-10-08 Evaporating apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12101376A JPS5346486A (en) 1976-10-08 1976-10-08 Evaporating apparatus

Publications (1)

Publication Number Publication Date
JPS5346486A true JPS5346486A (en) 1978-04-26

Family

ID=14800635

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12101376A Pending JPS5346486A (en) 1976-10-08 1976-10-08 Evaporating apparatus

Country Status (1)

Country Link
JP (1) JPS5346486A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52122936A (en) * 1976-04-07 1977-10-15 Matsushita Electric Ind Co Ltd Fire extinguisher for combustion device
JPS52142336A (en) * 1976-05-21 1977-11-28 Matsushita Electric Ind Co Ltd Fire distinguishing device for use in burner
WO1991009148A1 (en) * 1989-12-11 1991-06-27 Hitachi, Ltd. Device for vacuum treatment and device for and method of film formation using said device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52122936A (en) * 1976-04-07 1977-10-15 Matsushita Electric Ind Co Ltd Fire extinguisher for combustion device
JPS5636733B2 (en) * 1976-04-07 1981-08-26
JPS52142336A (en) * 1976-05-21 1977-11-28 Matsushita Electric Ind Co Ltd Fire distinguishing device for use in burner
WO1991009148A1 (en) * 1989-12-11 1991-06-27 Hitachi, Ltd. Device for vacuum treatment and device for and method of film formation using said device

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