JPS5346460B2 - - Google Patents
Info
- Publication number
- JPS5346460B2 JPS5346460B2 JP10235674A JP10235674A JPS5346460B2 JP S5346460 B2 JPS5346460 B2 JP S5346460B2 JP 10235674 A JP10235674 A JP 10235674A JP 10235674 A JP10235674 A JP 10235674A JP S5346460 B2 JPS5346460 B2 JP S5346460B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10235674A JPS5129160A (ja) | 1974-09-05 | 1974-09-05 | Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10235674A JPS5129160A (ja) | 1974-09-05 | 1974-09-05 | Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5129160A JPS5129160A (ja) | 1976-03-12 |
JPS5346460B2 true JPS5346460B2 (ja) | 1978-12-14 |
Family
ID=14325178
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10235674A Granted JPS5129160A (ja) | 1974-09-05 | 1974-09-05 | Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5129160A (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5517443A (en) * | 1978-07-26 | 1980-02-06 | Hitachi Electronics Eng Co Ltd | Detector for surface deficiency of optical type |
JPS55116210A (en) * | 1979-03-02 | 1980-09-06 | Hitachi Ltd | Detector for surface defect |
DE3732934A1 (de) * | 1987-09-30 | 1989-04-20 | Heidelberger Druckmasch Ag | Sensoreinrichtung |
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1974
- 1974-09-05 JP JP10235674A patent/JPS5129160A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5129160A (ja) | 1976-03-12 |