JPS5346460B2 - - Google Patents

Info

Publication number
JPS5346460B2
JPS5346460B2 JP10235674A JP10235674A JPS5346460B2 JP S5346460 B2 JPS5346460 B2 JP S5346460B2 JP 10235674 A JP10235674 A JP 10235674A JP 10235674 A JP10235674 A JP 10235674A JP S5346460 B2 JPS5346460 B2 JP S5346460B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10235674A
Other versions
JPS5129160A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10235674A priority Critical patent/JPS5129160A/ja
Publication of JPS5129160A publication Critical patent/JPS5129160A/ja
Publication of JPS5346460B2 publication Critical patent/JPS5346460B2/ja
Granted legal-status Critical Current

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Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10235674A 1974-09-05 1974-09-05 Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho Granted JPS5129160A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10235674A JPS5129160A (ja) 1974-09-05 1974-09-05 Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10235674A JPS5129160A (ja) 1974-09-05 1974-09-05 Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho

Publications (2)

Publication Number Publication Date
JPS5129160A JPS5129160A (ja) 1976-03-12
JPS5346460B2 true JPS5346460B2 (ja) 1978-12-14

Family

ID=14325178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10235674A Granted JPS5129160A (ja) 1974-09-05 1974-09-05 Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho

Country Status (1)

Country Link
JP (1) JPS5129160A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517443A (en) * 1978-07-26 1980-02-06 Hitachi Electronics Eng Co Ltd Detector for surface deficiency of optical type
JPS55116210A (en) * 1979-03-02 1980-09-06 Hitachi Ltd Detector for surface defect
DE3732934A1 (de) * 1987-09-30 1989-04-20 Heidelberger Druckmasch Ag Sensoreinrichtung

Also Published As

Publication number Publication date
JPS5129160A (ja) 1976-03-12

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