JPS5129160A - Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho - Google Patents

Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho

Info

Publication number
JPS5129160A
JPS5129160A JP10235674A JP10235674A JPS5129160A JP S5129160 A JPS5129160 A JP S5129160A JP 10235674 A JP10235674 A JP 10235674A JP 10235674 A JP10235674 A JP 10235674A JP S5129160 A JPS5129160 A JP S5129160A
Authority
JP
Japan
Prior art keywords
sokuteihoho
fukisokuhyomenkeijonotokeitekiseishitsu
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10235674A
Other languages
English (en)
Other versions
JPS5346460B2 (ja
Inventor
Hideo Takato
Tsugio Ishida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP10235674A priority Critical patent/JPS5129160A/ja
Publication of JPS5129160A publication Critical patent/JPS5129160A/ja
Publication of JPS5346460B2 publication Critical patent/JPS5346460B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10235674A 1974-09-05 1974-09-05 Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho Granted JPS5129160A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10235674A JPS5129160A (ja) 1974-09-05 1974-09-05 Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10235674A JPS5129160A (ja) 1974-09-05 1974-09-05 Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho

Publications (2)

Publication Number Publication Date
JPS5129160A true JPS5129160A (ja) 1976-03-12
JPS5346460B2 JPS5346460B2 (ja) 1978-12-14

Family

ID=14325178

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10235674A Granted JPS5129160A (ja) 1974-09-05 1974-09-05 Fukisokuhyomenkeijonotokeitekiseishitsu no sokuteihoho

Country Status (1)

Country Link
JP (1) JPS5129160A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517443A (en) * 1978-07-26 1980-02-06 Hitachi Electronics Eng Co Ltd Detector for surface deficiency of optical type
JPS55116210A (en) * 1979-03-02 1980-09-06 Hitachi Ltd Detector for surface defect
JPH01121711A (ja) * 1987-09-30 1989-05-15 Heidelberger Druckmas Ag センサ装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5517443A (en) * 1978-07-26 1980-02-06 Hitachi Electronics Eng Co Ltd Detector for surface deficiency of optical type
JPS55116210A (en) * 1979-03-02 1980-09-06 Hitachi Ltd Detector for surface defect
JPH01121711A (ja) * 1987-09-30 1989-05-15 Heidelberger Druckmas Ag センサ装置

Also Published As

Publication number Publication date
JPS5346460B2 (ja) 1978-12-14

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