JPS5344795B2 - - Google Patents

Info

Publication number
JPS5344795B2
JPS5344795B2 JP14452174A JP14452174A JPS5344795B2 JP S5344795 B2 JPS5344795 B2 JP S5344795B2 JP 14452174 A JP14452174 A JP 14452174A JP 14452174 A JP14452174 A JP 14452174A JP S5344795 B2 JPS5344795 B2 JP S5344795B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP14452174A
Other languages
Japanese (ja)
Other versions
JPS5171597A (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14452174A priority Critical patent/JPS5344795B2/ja
Publication of JPS5171597A publication Critical patent/JPS5171597A/ja
Publication of JPS5344795B2 publication Critical patent/JPS5344795B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Welding Or Cutting Using Electron Beams (AREA)
  • ing And Chemical Polishing (AREA)
JP14452174A 1974-12-18 1974-12-18 Expired JPS5344795B2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14452174A JPS5344795B2 (cg-RX-API-DMAC10.html) 1974-12-18 1974-12-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14452174A JPS5344795B2 (cg-RX-API-DMAC10.html) 1974-12-18 1974-12-18

Publications (2)

Publication Number Publication Date
JPS5171597A JPS5171597A (cg-RX-API-DMAC10.html) 1976-06-21
JPS5344795B2 true JPS5344795B2 (cg-RX-API-DMAC10.html) 1978-12-01

Family

ID=15364262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14452174A Expired JPS5344795B2 (cg-RX-API-DMAC10.html) 1974-12-18 1974-12-18

Country Status (1)

Country Link
JP (1) JPS5344795B2 (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5376758A (en) * 1976-12-20 1978-07-07 Nippon Telegr & Teleph Corp <Ntt> Plasma etching method
JPS54107875A (en) * 1978-02-14 1979-08-24 Toshiba Corp Producing apparatus for activated gas
JPS5553422A (en) * 1978-10-16 1980-04-18 Mitsubishi Electric Corp Plasma reactor
JPS56147438A (en) * 1980-04-16 1981-11-16 Fujitsu Ltd Microplasma treatment apparatus
JPS56155535A (en) * 1980-05-02 1981-12-01 Nippon Telegr & Teleph Corp <Ntt> Film forming device utilizing plasma

Also Published As

Publication number Publication date
JPS5171597A (cg-RX-API-DMAC10.html) 1976-06-21

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