JPS5343023B2 - - Google Patents

Info

Publication number
JPS5343023B2
JPS5343023B2 JP7564077A JP7564077A JPS5343023B2 JP S5343023 B2 JPS5343023 B2 JP S5343023B2 JP 7564077 A JP7564077 A JP 7564077A JP 7564077 A JP7564077 A JP 7564077A JP S5343023 B2 JPS5343023 B2 JP S5343023B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7564077A
Other versions
JPS539475A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS539475A publication Critical patent/JPS539475A/ja
Publication of JPS5343023B2 publication Critical patent/JPS5343023B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/39—Scanning a visible indication of the measured value and reproducing this indication at the remote place, e.g. on the screen of a cathode ray tube

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electron Beam Exposure (AREA)
JP7564077A 1976-07-12 1977-06-27 Device for detecting position of electron beam Granted JPS539475A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US70460576A 1976-07-12 1976-07-12

Publications (2)

Publication Number Publication Date
JPS539475A JPS539475A (en) 1978-01-27
JPS5343023B2 true JPS5343023B2 (ja) 1978-11-16

Family

ID=24830188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7564077A Granted JPS539475A (en) 1976-07-12 1977-06-27 Device for detecting position of electron beam

Country Status (3)

Country Link
JP (1) JPS539475A (ja)
BR (1) BR7704576A (ja)
SE (1) SE414833B (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54107677A (en) * 1978-02-10 1979-08-23 Jeol Ltd Rotation error detection method of apperture in electronic ray exposure and its unit
JPS5512784A (en) * 1978-07-14 1980-01-29 Chiyou Lsi Gijutsu Kenkyu Kumiai Location mark for electron beam exposure

Also Published As

Publication number Publication date
JPS539475A (en) 1978-01-27
BR7704576A (pt) 1978-04-04
SE7707933L (sv) 1978-01-13
SE414833B (sv) 1980-08-18

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