JPS5343021B2 - - Google Patents
Info
- Publication number
- JPS5343021B2 JPS5343021B2 JP15325876A JP15325876A JPS5343021B2 JP S5343021 B2 JPS5343021 B2 JP S5343021B2 JP 15325876 A JP15325876 A JP 15325876A JP 15325876 A JP15325876 A JP 15325876A JP S5343021 B2 JPS5343021 B2 JP S5343021B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
- Feeding Of Workpieces (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15325876A JPS5377178A (en) | 1976-12-20 | 1976-12-20 | Chuking device of semiconductor element substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15325876A JPS5377178A (en) | 1976-12-20 | 1976-12-20 | Chuking device of semiconductor element substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5377178A JPS5377178A (en) | 1978-07-08 |
| JPS5343021B2 true JPS5343021B2 (no) | 1978-11-16 |
Family
ID=15558512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15325876A Granted JPS5377178A (en) | 1976-12-20 | 1976-12-20 | Chuking device of semiconductor element substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5377178A (no) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60142068U (ja) * | 1984-02-27 | 1985-09-20 | 住倉工業株式会社 | カツプリング締付機におけるチヤツキング機構 |
| JPS6489530A (en) * | 1987-09-30 | 1989-04-04 | Toshiba Corp | Automatic setting device for semiconductor wafer |
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1976
- 1976-12-20 JP JP15325876A patent/JPS5377178A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5377178A (en) | 1978-07-08 |