JPS5343007B2 - - Google Patents
Info
- Publication number
- JPS5343007B2 JPS5343007B2 JP11938375A JP11938375A JPS5343007B2 JP S5343007 B2 JPS5343007 B2 JP S5343007B2 JP 11938375 A JP11938375 A JP 11938375A JP 11938375 A JP11938375 A JP 11938375A JP S5343007 B2 JPS5343007 B2 JP S5343007B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11938375A JPS5244162A (en) | 1975-10-04 | 1975-10-04 | Method of processing semiconductor wafer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11938375A JPS5244162A (en) | 1975-10-04 | 1975-10-04 | Method of processing semiconductor wafer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5244162A JPS5244162A (en) | 1977-04-06 |
| JPS5343007B2 true JPS5343007B2 (OSRAM) | 1978-11-16 |
Family
ID=14760140
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11938375A Granted JPS5244162A (en) | 1975-10-04 | 1975-10-04 | Method of processing semiconductor wafer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5244162A (OSRAM) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6058579B2 (ja) * | 1977-07-25 | 1985-12-20 | 日本電気株式会社 | 半導体ウエ−ハの製造方法 |
| JPH0738381B2 (ja) * | 1988-12-14 | 1995-04-26 | 信越半導体株式会社 | ウエーハ研磨装置 |
| US6722964B2 (en) | 2000-04-04 | 2004-04-20 | Ebara Corporation | Polishing apparatus and method |
-
1975
- 1975-10-04 JP JP11938375A patent/JPS5244162A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5244162A (en) | 1977-04-06 |