JPS5341030B2 - - Google Patents
Info
- Publication number
- JPS5341030B2 JPS5341030B2 JP9969173A JP9969173A JPS5341030B2 JP S5341030 B2 JPS5341030 B2 JP S5341030B2 JP 9969173 A JP9969173 A JP 9969173A JP 9969173 A JP9969173 A JP 9969173A JP S5341030 B2 JPS5341030 B2 JP S5341030B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Inking, Control Or Cleaning Of Printing Machines (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9969173A JPS5341030B2 (de) | 1973-09-06 | 1973-09-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9969173A JPS5341030B2 (de) | 1973-09-06 | 1973-09-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5051263A JPS5051263A (de) | 1975-05-08 |
| JPS5341030B2 true JPS5341030B2 (de) | 1978-10-31 |
Family
ID=14254050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9969173A Expired JPS5341030B2 (de) | 1973-09-06 | 1973-09-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5341030B2 (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5244171A (en) * | 1975-10-06 | 1977-04-06 | Nippon Telegr & Teleph Corp <Ntt> | Lsi mask inspection device |
| JPS54113262A (en) * | 1978-02-24 | 1979-09-04 | Hitachi Ltd | Mask inspection unit |
| JPS5915381B2 (ja) * | 1978-10-16 | 1984-04-09 | 日本電信電話株式会社 | パタ−ン検査法 |
| JPH0675038B2 (ja) * | 1983-03-11 | 1994-09-21 | ケイエルエイ・インストラメンツ・コ−ポレ−シヨン | 光学検査装置 |
| JPS6122237A (ja) * | 1985-05-17 | 1986-01-30 | Hitachi Ltd | 物体の外観検査装置 |
| JPH03115845A (ja) * | 1990-03-15 | 1991-05-16 | Tokyo Electron Ltd | 麈埃検出装置 |
-
1973
- 1973-09-06 JP JP9969173A patent/JPS5341030B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5051263A (de) | 1975-05-08 |