JPS5340578A - Analyzer for charged particle ray.s energy - Google Patents

Analyzer for charged particle ray.s energy

Info

Publication number
JPS5340578A
JPS5340578A JP11471876A JP11471876A JPS5340578A JP S5340578 A JPS5340578 A JP S5340578A JP 11471876 A JP11471876 A JP 11471876A JP 11471876 A JP11471876 A JP 11471876A JP S5340578 A JPS5340578 A JP S5340578A
Authority
JP
Japan
Prior art keywords
charged particle
analyzer
energy
particle ray
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11471876A
Other languages
Japanese (ja)
Inventor
Akira Tonomura
Junji Endo
Tsuyoshi Matsuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11471876A priority Critical patent/JPS5340578A/en
Publication of JPS5340578A publication Critical patent/JPS5340578A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]

Abstract

PURPOSE:To prevent appearance of ghost line in the detecting dirplay device due to scattering electron ray's, by installing double slits on the side of indidence of charged particle rays.
JP11471876A 1976-09-27 1976-09-27 Analyzer for charged particle ray.s energy Pending JPS5340578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11471876A JPS5340578A (en) 1976-09-27 1976-09-27 Analyzer for charged particle ray.s energy

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11471876A JPS5340578A (en) 1976-09-27 1976-09-27 Analyzer for charged particle ray.s energy

Publications (1)

Publication Number Publication Date
JPS5340578A true JPS5340578A (en) 1978-04-13

Family

ID=14644872

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11471876A Pending JPS5340578A (en) 1976-09-27 1976-09-27 Analyzer for charged particle ray.s energy

Country Status (1)

Country Link
JP (1) JPS5340578A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55111948A (en) * 1978-10-04 1980-08-29 Stork Brabant Bv Method and device for producing multiple separate image classified into naturally perpendicular directions
JPS61255095A (en) * 1985-05-03 1986-11-12 エレクトロバ−ト・リミテツド Vibration waveform soldering method and apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55111948A (en) * 1978-10-04 1980-08-29 Stork Brabant Bv Method and device for producing multiple separate image classified into naturally perpendicular directions
JPS61255095A (en) * 1985-05-03 1986-11-12 エレクトロバ−ト・リミテツド Vibration waveform soldering method and apparatus

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