JPS5340274B2 - - Google Patents
Info
- Publication number
- JPS5340274B2 JPS5340274B2 JP7068275A JP7068275A JPS5340274B2 JP S5340274 B2 JPS5340274 B2 JP S5340274B2 JP 7068275 A JP7068275 A JP 7068275A JP 7068275 A JP7068275 A JP 7068275A JP S5340274 B2 JPS5340274 B2 JP S5340274B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
- H01J61/28—Means for producing, introducing, or replenishing gas or vapour during operation of the lamp
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J61/00—Gas-discharge or vapour-discharge lamps
- H01J61/02—Details
- H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
Landscapes
- Discharge Lamps And Accessories Thereof (AREA)
- Plasma Technology (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US47887274A | 1974-06-13 | 1974-06-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5111684A JPS5111684A (ja) | 1976-01-29 |
| JPS5340274B2 true JPS5340274B2 (de) | 1978-10-26 |
Family
ID=23901715
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7068275A Granted JPS5111684A (ja) | 1974-06-13 | 1975-06-11 | Kokodofukushaookonausochi |
Country Status (6)
| Country | Link |
|---|---|
| JP (1) | JPS5111684A (de) |
| CA (1) | CA1015817A (de) |
| DE (1) | DE2525401C3 (de) |
| FR (1) | FR2275024A1 (de) |
| GB (1) | GB1468137A (de) |
| NL (1) | NL166580C (de) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2310883A1 (en) | 1999-06-07 | 2000-12-07 | Norman L. Arrison | Method and apparatus for fracturing brittle materials by thermal stressing |
| US6912356B2 (en) | 1999-06-07 | 2005-06-28 | Diversified Industries Ltd. | Method and apparatus for fracturing brittle materials by thermal stressing |
| US6621199B1 (en) | 2000-01-21 | 2003-09-16 | Vortek Industries Ltd. | High intensity electromagnetic radiation apparatus and method |
| US7781947B2 (en) | 2004-02-12 | 2010-08-24 | Mattson Technology Canada, Inc. | Apparatus and methods for producing electromagnetic radiation |
| CN1926658B (zh) * | 2004-02-12 | 2012-10-10 | 加拿大马特森技术有限公司 | 高强度电磁辐射装置与方法 |
| JP2011014541A (ja) * | 2010-07-09 | 2011-01-20 | Mattson Technology Canada Inc | 高強度の電磁放射線発生装置及び発生方法 |
| DE102011089090B4 (de) * | 2011-12-19 | 2014-07-03 | Von Ardenne Anlagentechnik Gmbh | Gasentladungslampe mit Kühleinrichtung |
| US9927094B2 (en) * | 2012-01-17 | 2018-03-27 | Kla-Tencor Corporation | Plasma cell for providing VUV filtering in a laser-sustained plasma light source |
-
1975
- 1975-04-11 CA CA224,438A patent/CA1015817A/en not_active Expired
- 1975-06-03 NL NL7506545A patent/NL166580C/xx not_active IP Right Cessation
- 1975-06-05 FR FR7517599A patent/FR2275024A1/fr active Granted
- 1975-06-06 DE DE19752525401 patent/DE2525401C3/de not_active Expired
- 1975-06-11 JP JP7068275A patent/JPS5111684A/ja active Granted
- 1975-06-12 GB GB2524775A patent/GB1468137A/en not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL166580B (nl) | 1981-03-16 |
| NL166580C (nl) | 1981-08-17 |
| CA1015817A (en) | 1977-08-16 |
| DE2525401C3 (de) | 1978-06-22 |
| DE2525401B2 (de) | 1977-10-27 |
| JPS5111684A (ja) | 1976-01-29 |
| GB1468137A (en) | 1977-03-23 |
| NL7506545A (nl) | 1975-12-16 |
| FR2275024B1 (de) | 1978-06-23 |
| FR2275024A1 (fr) | 1976-01-09 |
| DE2525401A1 (de) | 1976-01-02 |