CA1015817A - Liquid-cooled arc radiation source - Google Patents

Liquid-cooled arc radiation source

Info

Publication number
CA1015817A
CA1015817A CA224,438A CA224438A CA1015817A CA 1015817 A CA1015817 A CA 1015817A CA 224438 A CA224438 A CA 224438A CA 1015817 A CA1015817 A CA 1015817A
Authority
CA
Canada
Prior art keywords
liquid
radiation source
arc radiation
cooled arc
cooled
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA224,438A
Other languages
English (en)
French (fr)
Inventor
Roy A. Nodwell
David M. Camm
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canadian Patents and Development Ltd
Original Assignee
Canadian Patents and Development Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canadian Patents and Development Ltd filed Critical Canadian Patents and Development Ltd
Priority to US05/612,091 priority Critical patent/US4027185A/en
Application granted granted Critical
Publication of CA1015817A publication Critical patent/CA1015817A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/24—Means for obtaining or maintaining the desired pressure within the vessel
    • H01J61/28—Means for producing, introducing, or replenishing gas or vapour during operation of the lamp
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/52—Cooling arrangements; Heating arrangements; Means for circulating gas or vapour within the discharge space
CA224,438A 1974-06-13 1975-04-11 Liquid-cooled arc radiation source Expired CA1015817A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US05/612,091 US4027185A (en) 1974-06-13 1975-09-10 High intensity radiation source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US47887274A 1974-06-13 1974-06-13

Publications (1)

Publication Number Publication Date
CA1015817A true CA1015817A (en) 1977-08-16

Family

ID=23901715

Family Applications (1)

Application Number Title Priority Date Filing Date
CA224,438A Expired CA1015817A (en) 1974-06-13 1975-04-11 Liquid-cooled arc radiation source

Country Status (6)

Country Link
JP (1) JPS5111684A (de)
CA (1) CA1015817A (de)
DE (1) DE2525401C3 (de)
FR (1) FR2275024A1 (de)
GB (1) GB1468137A (de)
NL (1) NL166580C (de)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6608967B1 (en) 1999-06-07 2003-08-19 Norman L. Arrison Method and apparatus for fracturing brittle materials by thermal stressing
US6621199B1 (en) 2000-01-21 2003-09-16 Vortek Industries Ltd. High intensity electromagnetic radiation apparatus and method
US6912356B2 (en) 1999-06-07 2005-06-28 Diversified Industries Ltd. Method and apparatus for fracturing brittle materials by thermal stressing
US7781947B2 (en) 2004-02-12 2010-08-24 Mattson Technology Canada, Inc. Apparatus and methods for producing electromagnetic radiation

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1926658B (zh) * 2004-02-12 2012-10-10 加拿大马特森技术有限公司 高强度电磁辐射装置与方法
JP2011014541A (ja) * 2010-07-09 2011-01-20 Mattson Technology Canada Inc 高強度の電磁放射線発生装置及び発生方法
DE102011089090B4 (de) * 2011-12-19 2014-07-03 Von Ardenne Anlagentechnik Gmbh Gasentladungslampe mit Kühleinrichtung
US9927094B2 (en) * 2012-01-17 2018-03-27 Kla-Tencor Corporation Plasma cell for providing VUV filtering in a laser-sustained plasma light source

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6608967B1 (en) 1999-06-07 2003-08-19 Norman L. Arrison Method and apparatus for fracturing brittle materials by thermal stressing
US6912356B2 (en) 1999-06-07 2005-06-28 Diversified Industries Ltd. Method and apparatus for fracturing brittle materials by thermal stressing
US6621199B1 (en) 2000-01-21 2003-09-16 Vortek Industries Ltd. High intensity electromagnetic radiation apparatus and method
US7781947B2 (en) 2004-02-12 2010-08-24 Mattson Technology Canada, Inc. Apparatus and methods for producing electromagnetic radiation
US8384274B2 (en) 2004-02-12 2013-02-26 Mattson Technology, Inc. High-intensity electromagnetic radiation apparatus and methods

Also Published As

Publication number Publication date
NL166580B (nl) 1981-03-16
NL166580C (nl) 1981-08-17
DE2525401C3 (de) 1978-06-22
DE2525401B2 (de) 1977-10-27
JPS5340274B2 (de) 1978-10-26
JPS5111684A (ja) 1976-01-29
GB1468137A (en) 1977-03-23
NL7506545A (nl) 1975-12-16
FR2275024B1 (de) 1978-06-23
FR2275024A1 (fr) 1976-01-09
DE2525401A1 (de) 1976-01-02

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