JPS5339318B2 - - Google Patents

Info

Publication number
JPS5339318B2
JPS5339318B2 JP10600575A JP10600575A JPS5339318B2 JP S5339318 B2 JPS5339318 B2 JP S5339318B2 JP 10600575 A JP10600575 A JP 10600575A JP 10600575 A JP10600575 A JP 10600575A JP S5339318 B2 JPS5339318 B2 JP S5339318B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10600575A
Other languages
Japanese (ja)
Other versions
JPS5230392A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50106005A priority Critical patent/JPS5230392A/ja
Publication of JPS5230392A publication Critical patent/JPS5230392A/ja
Publication of JPS5339318B2 publication Critical patent/JPS5339318B2/ja
Granted legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/546Polycrystalline silicon PV cells

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Photovoltaic Devices (AREA)
JP50106005A 1975-09-03 1975-09-03 Electrode and it's manufacturing process Granted JPS5230392A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50106005A JPS5230392A (en) 1975-09-03 1975-09-03 Electrode and it's manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50106005A JPS5230392A (en) 1975-09-03 1975-09-03 Electrode and it's manufacturing process

Publications (2)

Publication Number Publication Date
JPS5230392A JPS5230392A (en) 1977-03-08
JPS5339318B2 true JPS5339318B2 (enFirst) 1978-10-20

Family

ID=14422557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50106005A Granted JPS5230392A (en) 1975-09-03 1975-09-03 Electrode and it's manufacturing process

Country Status (1)

Country Link
JP (1) JPS5230392A (enFirst)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4605947A (en) * 1983-03-07 1986-08-12 Motorola Inc. Titanium nitride MOS device gate electrode and method of producing
JP2776807B2 (ja) * 1987-01-14 1998-07-16 株式会社日立製作所 半導体装置の製造方法
JPH0917749A (ja) * 1996-08-02 1997-01-17 Hitachi Ltd 薄膜形成装置
JP2770822B2 (ja) * 1996-08-02 1998-07-02 株式会社日立製作所 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5230392A (en) 1977-03-08

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