JPS5337704B2 - - Google Patents
Info
- Publication number
- JPS5337704B2 JPS5337704B2 JP9109976A JP9109976A JPS5337704B2 JP S5337704 B2 JPS5337704 B2 JP S5337704B2 JP 9109976 A JP9109976 A JP 9109976A JP 9109976 A JP9109976 A JP 9109976A JP S5337704 B2 JPS5337704 B2 JP S5337704B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9109976A JPS5317076A (en) | 1976-07-30 | 1976-07-30 | Silicon mask for x-ray exposure and its production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9109976A JPS5317076A (en) | 1976-07-30 | 1976-07-30 | Silicon mask for x-ray exposure and its production |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5317076A JPS5317076A (en) | 1978-02-16 |
| JPS5337704B2 true JPS5337704B2 (fi) | 1978-10-11 |
Family
ID=14017062
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9109976A Granted JPS5317076A (en) | 1976-07-30 | 1976-07-30 | Silicon mask for x-ray exposure and its production |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5317076A (fi) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57211732A (en) * | 1981-06-24 | 1982-12-25 | Toshiba Corp | X ray exposing mask and manufacture thereof |
| JPH0715877B2 (ja) * | 1985-07-19 | 1995-02-22 | 日本電信電話株式会社 | Ｘ線マスク |
| JP2635322B2 (ja) * | 1987-02-17 | 1997-07-30 | 松下電子工業株式会社 | Ｘ線マスクの製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5192181A (en) * | 1975-02-10 | 1976-08-12 | X senrokopataankeiseihoho oyobi masukukiban |
-
1976
- 1976-07-30 JP JP9109976A patent/JPS5317076A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5192181A (en) * | 1975-02-10 | 1976-08-12 | X senrokopataankeiseihoho oyobi masukukiban |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5317076A (en) | 1978-02-16 |