JPS5337189B2 - - Google Patents

Info

Publication number
JPS5337189B2
JPS5337189B2 JP3910175A JP3910175A JPS5337189B2 JP S5337189 B2 JPS5337189 B2 JP S5337189B2 JP 3910175 A JP3910175 A JP 3910175A JP 3910175 A JP3910175 A JP 3910175A JP S5337189 B2 JPS5337189 B2 JP S5337189B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3910175A
Other versions
JPS51114877A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3910175A priority Critical patent/JPS51114877A/ja
Publication of JPS51114877A publication Critical patent/JPS51114877A/ja
Publication of JPS5337189B2 publication Critical patent/JPS5337189B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP3910175A 1975-04-02 1975-04-02 Coating equipment Granted JPS51114877A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3910175A JPS51114877A (en) 1975-04-02 1975-04-02 Coating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3910175A JPS51114877A (en) 1975-04-02 1975-04-02 Coating equipment

Publications (2)

Publication Number Publication Date
JPS51114877A JPS51114877A (en) 1976-10-08
JPS5337189B2 true JPS5337189B2 (ja) 1978-10-06

Family

ID=12543671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3910175A Granted JPS51114877A (en) 1975-04-02 1975-04-02 Coating equipment

Country Status (1)

Country Link
JP (1) JPS51114877A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6026417U (ja) * 1983-07-29 1985-02-22 株式会社クボタ ベルトコンベヤのワイパ装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6088429A (ja) * 1983-10-20 1985-05-18 Fuji Electric Co Ltd 半導体塗布拡散方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6026417U (ja) * 1983-07-29 1985-02-22 株式会社クボタ ベルトコンベヤのワイパ装置

Also Published As

Publication number Publication date
JPS51114877A (en) 1976-10-08

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