JPS5337189B2 - - Google Patents
Info
- Publication number
- JPS5337189B2 JPS5337189B2 JP3910175A JP3910175A JPS5337189B2 JP S5337189 B2 JPS5337189 B2 JP S5337189B2 JP 3910175 A JP3910175 A JP 3910175A JP 3910175 A JP3910175 A JP 3910175A JP S5337189 B2 JPS5337189 B2 JP S5337189B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3910175A JPS51114877A (en) | 1975-04-02 | 1975-04-02 | Coating equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3910175A JPS51114877A (en) | 1975-04-02 | 1975-04-02 | Coating equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51114877A JPS51114877A (en) | 1976-10-08 |
JPS5337189B2 true JPS5337189B2 (ja) | 1978-10-06 |
Family
ID=12543671
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3910175A Granted JPS51114877A (en) | 1975-04-02 | 1975-04-02 | Coating equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51114877A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6026417U (ja) * | 1983-07-29 | 1985-02-22 | 株式会社クボタ | ベルトコンベヤのワイパ装置 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6088429A (ja) * | 1983-10-20 | 1985-05-18 | Fuji Electric Co Ltd | 半導体塗布拡散方法 |
-
1975
- 1975-04-02 JP JP3910175A patent/JPS51114877A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6026417U (ja) * | 1983-07-29 | 1985-02-22 | 株式会社クボタ | ベルトコンベヤのワイパ装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS51114877A (en) | 1976-10-08 |