JPS5334466B2 - - Google Patents
Info
- Publication number
- JPS5334466B2 JPS5334466B2 JP2919876A JP2919876A JPS5334466B2 JP S5334466 B2 JPS5334466 B2 JP S5334466B2 JP 2919876 A JP2919876 A JP 2919876A JP 2919876 A JP2919876 A JP 2919876A JP S5334466 B2 JPS5334466 B2 JP S5334466B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2919876A JPS52113167A (en) | 1976-03-19 | 1976-03-19 | X-ray exposing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2919876A JPS52113167A (en) | 1976-03-19 | 1976-03-19 | X-ray exposing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS52113167A JPS52113167A (en) | 1977-09-22 |
| JPS5334466B2 true JPS5334466B2 (cs) | 1978-09-20 |
Family
ID=12269488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2919876A Granted JPS52113167A (en) | 1976-03-19 | 1976-03-19 | X-ray exposing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS52113167A (cs) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS551107A (en) * | 1978-06-16 | 1980-01-07 | Nippon Telegr & Teleph Corp <Ntt> | Exposure device |
| JPS598384Y2 (ja) * | 1979-01-04 | 1984-03-15 | 松下電器産業株式会社 | 音響機器 |
| WO1981001578A1 (fr) * | 1979-11-28 | 1981-06-11 | Inst Elektrokhimii | Procede d'obtention d'alcools monochlorhydrine ou dichlorhydrine de serie saturee |
| JPS593579Y2 (ja) * | 1981-09-10 | 1984-01-31 | 日本電信電話株式会社 | 露光装置 |
| JPS60178627A (ja) * | 1984-02-24 | 1985-09-12 | Canon Inc | Ｘ線転写装置 |
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1976
- 1976-03-19 JP JP2919876A patent/JPS52113167A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS52113167A (en) | 1977-09-22 |