JPS5334465B2 - - Google Patents

Info

Publication number
JPS5334465B2
JPS5334465B2 JP1977276A JP1977276A JPS5334465B2 JP S5334465 B2 JPS5334465 B2 JP S5334465B2 JP 1977276 A JP1977276 A JP 1977276A JP 1977276 A JP1977276 A JP 1977276A JP S5334465 B2 JPS5334465 B2 JP S5334465B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977276A
Other languages
Japanese (ja)
Other versions
JPS52103965A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977276A priority Critical patent/JPS52103965A/en
Publication of JPS52103965A publication Critical patent/JPS52103965A/en
Publication of JPS5334465B2 publication Critical patent/JPS5334465B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1977276A 1976-02-25 1976-02-25 Electron beam projector unit Granted JPS52103965A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977276A JPS52103965A (en) 1976-02-25 1976-02-25 Electron beam projector unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977276A JPS52103965A (en) 1976-02-25 1976-02-25 Electron beam projector unit

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP9002879A Division JPS5536990A (en) 1979-07-16 1979-07-16 Apparatus for applying electron beam

Publications (2)

Publication Number Publication Date
JPS52103965A JPS52103965A (en) 1977-08-31
JPS5334465B2 true JPS5334465B2 (en) 1978-09-20

Family

ID=12008614

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977276A Granted JPS52103965A (en) 1976-02-25 1976-02-25 Electron beam projector unit

Country Status (1)

Country Link
JP (1) JPS52103965A (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5545513A (en) * 1978-09-22 1980-03-31 Daihen Corp Charged particle beam machining device
NL7904580A (en) * 1979-06-12 1980-12-16 Philips Nv DEVICE FOR WRITING PATTERNS IN A LAYER ON A SUBSTRATE WITH AN ELECTRICALLY CHARGED PARTICLE BUNDLE.
JPS5627663U (en) * 1979-07-06 1981-03-14
JPS5833702Y2 (en) * 1981-10-29 1983-07-28 日本電信電話株式会社 Electron beam exposure equipment
JPS5940529A (en) * 1982-08-31 1984-03-06 Toshiba Corp Electron beam transferring device
JPH077653B2 (en) * 1987-04-11 1995-01-30 株式会社日立製作所 Observation device by scanning electron microscope
JP7018098B2 (en) * 2020-08-13 2022-02-09 株式会社ホロン Autofocus device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS497700A (en) * 1972-05-26 1974-01-23
JPS4924519A (en) * 1972-06-30 1974-03-05

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS497700A (en) * 1972-05-26 1974-01-23
JPS4924519A (en) * 1972-06-30 1974-03-05

Also Published As

Publication number Publication date
JPS52103965A (en) 1977-08-31

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