JPS5334463B2 - - Google Patents

Info

Publication number
JPS5334463B2
JPS5334463B2 JP4279076A JP4279076A JPS5334463B2 JP S5334463 B2 JPS5334463 B2 JP S5334463B2 JP 4279076 A JP4279076 A JP 4279076A JP 4279076 A JP4279076 A JP 4279076A JP S5334463 B2 JPS5334463 B2 JP S5334463B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4279076A
Other languages
Japanese (ja)
Other versions
JPS52126177A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4279076A priority Critical patent/JPS52126177A/ja
Publication of JPS52126177A publication Critical patent/JPS52126177A/ja
Publication of JPS5334463B2 publication Critical patent/JPS5334463B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP4279076A 1976-04-15 1976-04-15 Etching device Granted JPS52126177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4279076A JPS52126177A (en) 1976-04-15 1976-04-15 Etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4279076A JPS52126177A (en) 1976-04-15 1976-04-15 Etching device

Publications (2)

Publication Number Publication Date
JPS52126177A JPS52126177A (en) 1977-10-22
JPS5334463B2 true JPS5334463B2 (enrdf_load_stackoverflow) 1978-09-20

Family

ID=12645747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4279076A Granted JPS52126177A (en) 1976-04-15 1976-04-15 Etching device

Country Status (1)

Country Link
JP (1) JPS52126177A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5554939U (enrdf_load_stackoverflow) * 1978-10-09 1980-04-14
JPS5678457U (enrdf_load_stackoverflow) * 1979-11-15 1981-06-25
JPS57184224A (en) * 1981-05-08 1982-11-12 Fujitsu Ltd Microwave plasma treating method and its device
JPH063801B2 (ja) * 1983-11-18 1994-01-12 株式会社日立製作所 マイクロ波プラズマ処理方法及び装置

Also Published As

Publication number Publication date
JPS52126177A (en) 1977-10-22

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