JPS52126177A - Etching device - Google Patents

Etching device

Info

Publication number
JPS52126177A
JPS52126177A JP4279076A JP4279076A JPS52126177A JP S52126177 A JPS52126177 A JP S52126177A JP 4279076 A JP4279076 A JP 4279076A JP 4279076 A JP4279076 A JP 4279076A JP S52126177 A JPS52126177 A JP S52126177A
Authority
JP
Japan
Prior art keywords
etching device
etching
sample
dept
assured
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4279076A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5334463B2 (enrdf_load_stackoverflow
Inventor
Keizo Suzuki
Sadayuki Okudaira
Ichiro Shikamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP4279076A priority Critical patent/JPS52126177A/ja
Publication of JPS52126177A publication Critical patent/JPS52126177A/ja
Publication of JPS5334463B2 publication Critical patent/JPS5334463B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Welding Or Cutting Using Electron Beams (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP4279076A 1976-04-15 1976-04-15 Etching device Granted JPS52126177A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4279076A JPS52126177A (en) 1976-04-15 1976-04-15 Etching device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4279076A JPS52126177A (en) 1976-04-15 1976-04-15 Etching device

Publications (2)

Publication Number Publication Date
JPS52126177A true JPS52126177A (en) 1977-10-22
JPS5334463B2 JPS5334463B2 (enrdf_load_stackoverflow) 1978-09-20

Family

ID=12645747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4279076A Granted JPS52126177A (en) 1976-04-15 1976-04-15 Etching device

Country Status (1)

Country Link
JP (1) JPS52126177A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5554939U (enrdf_load_stackoverflow) * 1978-10-09 1980-04-14
JPS5678457U (enrdf_load_stackoverflow) * 1979-11-15 1981-06-25
JPS57184224A (en) * 1981-05-08 1982-11-12 Fujitsu Ltd Microwave plasma treating method and its device
JPS60109231A (ja) * 1983-11-18 1985-06-14 Hitachi Ltd マイクロ波プラズマ処理方法及び装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5554939U (enrdf_load_stackoverflow) * 1978-10-09 1980-04-14
JPS5678457U (enrdf_load_stackoverflow) * 1979-11-15 1981-06-25
JPS57184224A (en) * 1981-05-08 1982-11-12 Fujitsu Ltd Microwave plasma treating method and its device
JPS60109231A (ja) * 1983-11-18 1985-06-14 Hitachi Ltd マイクロ波プラズマ処理方法及び装置

Also Published As

Publication number Publication date
JPS5334463B2 (enrdf_load_stackoverflow) 1978-09-20

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