JPS5333650A - Crystal type film thickness gauge - Google Patents
Crystal type film thickness gaugeInfo
- Publication number
- JPS5333650A JPS5333650A JP10792076A JP10792076A JPS5333650A JP S5333650 A JPS5333650 A JP S5333650A JP 10792076 A JP10792076 A JP 10792076A JP 10792076 A JP10792076 A JP 10792076A JP S5333650 A JPS5333650 A JP S5333650A
- Authority
- JP
- Japan
- Prior art keywords
- film thickness
- type film
- thickness gauge
- crystal type
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
PURPOSE: Detection accuracy is enhanced and the indication of the detection measurable range of a detecting oscillator is also made possible by detecting the frequency differences between the detecting oscillator and a reference oscillator in measuring the thicknesses of the film deposited on crystal vibrators.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10792076A JPS5333650A (en) | 1976-09-10 | 1976-09-10 | Crystal type film thickness gauge |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10792076A JPS5333650A (en) | 1976-09-10 | 1976-09-10 | Crystal type film thickness gauge |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5333650A true JPS5333650A (en) | 1978-03-29 |
Family
ID=14471387
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10792076A Pending JPS5333650A (en) | 1976-09-10 | 1976-09-10 | Crystal type film thickness gauge |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5333650A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04115300U (en) * | 1991-03-25 | 1992-10-13 | フジモリ産業株式会社 | blast hole filling |
-
1976
- 1976-09-10 JP JP10792076A patent/JPS5333650A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04115300U (en) * | 1991-03-25 | 1992-10-13 | フジモリ産業株式会社 | blast hole filling |
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